Principles of lithography

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1、PrincipleoflithographyGaoShaowenContent1INTRODUCTION....................................................................................................................-5-2SCALARMODEL................................................................................................

2、...................-5-2.1BASICALGORITHM..................................................................................................................-5-2.2SPATIALFREQUENCIES......................................................................................................

3、......-6-2.3MASKANDOBJECTSPECTRUMDESCRIPTION...........................................................................-7-2.3.1Binary..........................................................................................................................-7-2.3.2Alt-PSM.........

4、............................................................................................................-7-2.3.3Att-PSM.....................................................................................................................-7-2.4PUPILTYPE........................

5、......................................................................................................-8-2.4.1IlluminatorPupilFillIntensityVariation....................................................................-8-2.4.2Variationtypes.........................................

6、....................................................................-8-2.4.3ConventionalIllumination.........................................................................................-10-2.4.4AnnularIllumination..............................................................

7、...................................-10-2.4.5QuasarIllumination..................................................................................................-11-2.4.6X-dipoleIllumination..........................................................................................

8、.......-12-2.4.7Y-dipoleIllumination...........