欢迎来到天天文库
浏览记录
ID:40960691
大小:2.02 MB
页数:85页
时间:2019-08-12
《Principles of lithography》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、PrincipleoflithographyGaoShaowenContent1INTRODUCTION....................................................................................................................-5-2SCALARMODEL................................................................................................
2、...................-5-2.1BASICALGORITHM..................................................................................................................-5-2.2SPATIALFREQUENCIES......................................................................................................
3、......-6-2.3MASKANDOBJECTSPECTRUMDESCRIPTION...........................................................................-7-2.3.1Binary..........................................................................................................................-7-2.3.2Alt-PSM.........
4、............................................................................................................-7-2.3.3Att-PSM.....................................................................................................................-7-2.4PUPILTYPE........................
5、......................................................................................................-8-2.4.1IlluminatorPupilFillIntensityVariation....................................................................-8-2.4.2Variationtypes.........................................
6、....................................................................-8-2.4.3ConventionalIllumination.........................................................................................-10-2.4.4AnnularIllumination..............................................................
7、...................................-10-2.4.5QuasarIllumination..................................................................................................-11-2.4.6X-dipoleIllumination..........................................................................................
8、.......-12-2.4.7Y-dipoleIllumination...........
此文档下载收益归作者所有