SEMI M27-96 PRACTICE FOR DETERMINING THE PRECISION OVER TOLERANCE

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1、SEMIM27-96N/A©SEMI1996PRACTICEFORDETERMININGTHEPRECISIONOVERTOLERANCE(P/T)RATIOOFTESTEQUIPMENT1Purposetheconditionsnormallyencounteredinapplyingtheinstrument.Noinformationisdevelopedconcerning1.1Thispracticecoversaprocedureforestimatingthecomponentsoftheprecision;con

2、sequently,thisthecapabilityofatestinstrumentwithrespecttothepracticecannotbeusedtodeterminetheoriginsoftolerance(specification)ofaparameter.measurementvariability.SuchinformationcanbeNOTE1-Ifthevariabilityassociatedwiththemea-developedthroughtheuseofafullmeasurementc

3、apa-surementoftheparameterbythisinstrumentisverybilityanalysissuchasaproperlydesignedgaugesmallcomparedwiththewidthofthespecificationrepeatabilityandreproducibilitystudy.1range,thechancesofobtainingatestresultoutsidethe2.2.2Bothdouble-sidedandsingle-sidedspecifica-sp

4、ecificationlimitswhentheparameteractuallyliestionsarecoveredbythispractice.withinthespecificationlimits(orconversely)isquitesmall.Ontheotherhand,ifthisvariabilityistoolarge,NOTE5—ItisnotmeaningfultocompareP/Tratiostheprobabilityofobtainingafalsetestresultismuchbetwee

5、nsingle-sidedanddouble-sidedspecificationsgreater.ofthesameparameter.2Scope3ReferencedDocuments2.1Thispracticeprovidesastandardizedmethodfor3.1SEMIStandarddeterminingtherelationshipbetweenthemeasurementSEMIM1—SpecificationsforPolishedMonocrystal-precisionofasingleins

6、trumentandthespecificationlineSiliconWafersrange.2.2Theratioofprecisiontotolerance(P/T)canbe4Terminologyusedasameasureofthesuitabilityofameasurement4.1accuracy—Theclosenessofagreementbetweenprocesstoevaluateaspecificparameteragainstagivenatestresultorthemeanofagroupo

7、ftestresultsandspecification.CalculationoftheP/Tratiorequiresthetruevalue(acceptedreferencevalue).knowledgebothoftheprecisionofthemeasurementprocessandofthespecificationrangeortoleranceofDISCUSSION—Accuracydependsonbothprecisioninterest.andbiasofthemeasurementprocess

8、.Sinceinroutineuse,randomcomponentsoferror(resultinginimpreci-NOTE2—Ifthetolerancehasbeenarbitrarilydefinedsion)andsystematiccompon