SEMI E56-1296 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY

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1、SEMIE56-1296N/A©SEMI1996TESTMETHODFORDETERMININGACCURACY,LINEARITY,REPEATABILITY,SHORT-TERMREPRODUCIBILITY,HYSTERESIS,ANDDEADBANDOFTHERMALMASSFLOWCONTROLLERS1Purpose4ReferencedDocumentsThepurposeofthisdocumentistoprovideastandard-4.1SEMIStandardizedmethodtoquantifytheaccuracy,linearity,repeat-SEMI

2、E17—GuidelineforMassFlowControllerability,short-termreproducibility,hysteresis,andTransientCharacteristicsTestsdeadbandofathermalmassflowcontroller.4.2ASMEDocument1Theintentofthisdocumentisnottosuggestanyspe-cifictestingprogrambuttospecifythetestmethodtoASMEMFC-10M—MethodforEstablishingInstalla-beus

3、edwhentestingforparametersthatarecoveredtionEffectsonFlowmetersbythismethod.Theusermightusethisdocumentto24.3ISADocumentchecksignificantperformancecharacteristicssuchasaccuracy,precison,bias,repeatability,linearity,short-ISAS51.1—ProcessInstrumentationTerminologytermreproducibility,anddeadbandunder

4、asetofcloselycontrolledtestconditions.5TerminologyThesignificanceoftheaccuracycalculationsinthis5.1AcronymsmethodistoallowanMFCusertotransferaprocess5.1.1A—MeasuredValuefromonemanufacturingtooltoanotherandtoexchangeMFCswithinasinglemanufacturingtool5.1.2Aa—Averagemeasuredvaluewhilemaintainingproces

5、scontrol.5.1.3Aa—Averagemeasuredvalueat100%setpoint5.1.4AD—AccuracyoftheDUT2Scope2.1Thisdocumentdescribestheconditionsandpro-5.1.5ADf—Accuracyoftheflowstandardceduresfortestingtheaccuracy,linearity,repeatability,5.1.6AS—Accuracyofsetpointhysteresis,anddeadbandofthermalmassflowcontrol-5.1.7Al—Measure

6、dvalue,downcyclelers(MFCs).Becauseofthegenericnatureofthisdoc-ument,notalltestproceduresapplytoalltypesof5.1.8Au—Measuredvalue,upcycleMFCs.5.1.9B—Bias2.2Thisdocumentprovidedacommonbasisfor5.1.10D—Deadbandvaluecommunicationbetweenmanufacturersandusers.5.1.11DBD—Deadbandofdevice3Limitations5.1.12DBS

7、—DeadbandofsetpointItisnotpracticaltoevaluateperformanceunderall5.1.13Dl—Lowerdeadbandvaluepossiblecombinationsofoperatingconditions.Thistestprocedureshouldbeappliedunderlaboratorycon-5.1.14Du—Upperdeadbandvalued