SEMI E69-0298 TEST METHOD FOR DETERMINING REPRODUCIBILITY

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1、SEMIE69-0298N/A©SEMI1998TESTMETHODFORDETERMININGREPRODUCIBILITYANDZERODRIFTFORTHERMALMASSFLOWCONTROLLERS1Purpose4.2ANSIDocuments11.1Thepurposeofthisdocumentistoprovideastan-ANSIC39.5ÑSafetyRequirementsforElectricalanddardizedmethodtoquantifythereproducibilityandElectronicMeasuringandCon

2、trollingInstrumentationzerodriftofathermalmassßowcontroller.ANSIC42.100ÑDictionaryofElectricalandElec-1.2TheintentofthisdocumentisnottosuggestanytronicsTermsspeciÞctestingprogrambuttospecifythetestmethodANSIMC4.1ÑDynamicResponseTestingofProcesstobeusedwhentestingforparametersthatarecove

3、redControlInstrumentationbythismethod.TheusermightusethisdocumenttochecksigniÞcantperformancecharacteristics,suchas4.3ASMEDocument2reproducibilityandzerodrift,underasetofcloselyASMEMFC-1MÑGlossaryofTermsUsedinthecontrolledtestconditions.MeasurementofFluidFlowinPipes1.3ThesigniÞcanceofth

4、eaccuracycalculationsin34.4IECDocumentsthismethodistoallowanMFCusertotransferapro-cessfromonemanufacturingtooltoanotherandtoIEC160ÑStandardAtmosphericConditionsforTestexchangeMFCswithinasinglemanufacturingtoolPurposeswhilemaintainingprocesscontrol.IEC546ÑMethodsofEvaluatingthePerformanc

5、eofControllerswithAnalogue[sic]SignalsforUsein2ScopeIndustrialProcessControl2.1Thisdocumentdescribestheconditionsandproce-44.5ISADocumentsduresfortestingthereproducibilityandzerodriftofthermalmassßowcontrollers(MFCs).BecauseoftheISAS7.3ÑQualityStandardsforInstrumentAirgenericnatureofthi

6、sdocument,notalltestproceduresISAS51.1ÑProcessInstrumentationTerminologyapplytoalltypesofMFCs.ANSI/ISA-1979(reafÞrmed1993)2.2Thisdocumentprovidesacommonbasisforcom-municationbetweenmanufacturersandusers.3Limitations3.1Itisnotpracticaltoevaluateperformanceunderallpossiblecombinationsofop

7、eratingconditions.Thistestprocedureshouldbeappliedunderlaboratorycon-ditions;itsintentistocollectsufÞcientdatatoformajudgementoftheÞeldperformanceoftheMFCbeingtested.4ReferencedDocuments1AmericanNationalStandardsInstitute,Inc.,1430Broadway,New4.1SEMIDocumentYork,NY100182America