SEMI E68-0997 TEST METHOD FOR DETERMINING WARM-UP TIME OF

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1、4SEMIE68-0997N/A©SEMI1997TESTMETHODFORDETERMININGWARM-UPTIMEOFMASSFLOWCONTROLLERS1Purpose5.2DeÞnitions1.1Thepurposeofthismethodistoprovideastan-5.2.1deviceundertestÑTheMFCbeingtestedfordardizedmethodforquantifyingthewarm-uptimeofwarm-uptime.anMFC.5.2.2indicatedßowÑFlowindic

2、atedbytheMFCNOTE:Warm-uptimesaffecttheinitialperformanceundertest.ElectricaloutputoftheDUT.ofamassßowcontroller(MFC).Warm-uptimeisnec-5.2.3stabilityÑAconditionthatexhibitsonlynatu-essaryinformationindecidingifaprocesstoolisral,randomvariationsintheabsenceofunnatural,readyto

3、beputbackintoservice.Inaddition,warm-upassignable-causevariations.Fortheseveralpurposesdatawillbeusefulincalibrationlabs.ofthistest,stabilityisdeÞnedas±10%oftheaccuracyoftheDUTatfullscale.2Scope5.2.4steadystateÑStateatwhichtheindicatedßow2.1Thetestconditionsinthismethodarei

4、ntendedtoisstablefora15-minutetimeperiod.simulatebenchtopwarm-up,withanMFCthathasbeenequalizedtoambientconditionsfor24hours5.2.5warm-upÑAprocesswheretheMFCgoesbeforetheapplicationofpower.fromanunpoweredconditiontoaconditionwheretheoutputiswithin±1%fullscale,oftheÞnalsteadys

5、tate3Limitationsoutput.3.1Conditionsinthelabmaybedifferentfromcondi-6SummaryofTestMethodtionsfoundintheÞeldandmayinßuencetestresults.Thistestisintendedtomeasurewarm-upunderacon-6.1TheDUTisconnectedinserieswithshut-offtrolledcondition.valvesoneithersideoftheDUT.Withnogasßowa

6、ndtheDUTpowered,indicatedßowismonitoreduntil3.2TheMFCistobeatambienttemperaturebeforesteadystateisachieved.Powerisbrießydisconnectedthebeginningofthetest.thenreconnectedandindicatedßowisagainmonitored3.3Duetomanufacturingvariability,warm-uptimesuntilsteadystateisachieved.ma

7、yvaryforthesamemodelofMFC.ThisspeciÞca-tionaddressesamethodfortakingasingledatapoint7SigniÞcanceandUserepetitivelyfromthesameMFC.Resultingdatawill7.1Datageneratedbythismethodisusedtoestimateshowexactlyhowwarm-upeffectschangethedeliv-theamountoftimeanMFCshouldbepoweredupinae

8、redßowofthatparticularMFC.Tostatisticallyquan-processtoolbeforeresumingproduction.