SEMI E67-0997 TEST METHOD FOR DETERMINING RELIABILITY OF MASS

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1、SEMIE67-0997N/A©SEMI0997TESTMETHODFORDETERMININGRELIABILITYOFMASSFLOWCONTROLLER1Purpose4.2SEMASPECs1ThisdocumentdescribesamethodtohelpdetermineNOTE:TheSEMASPECsnotedherewillbesuper-theabilityofanMFCtomeetthemanufacturer'spub-cededbythecomparableSEMIdocumentswhenavail-lishedspeciÞcationsoveritslifeti

2、me.Theresultsofable.thetestwillalsobeusefulinthecomparisonofMFCs.90120391B-STDÑSEMATECHTestMethodfortheDeterminationoftheHeliumLeakRateforGasDistri-2ScopebutionSystemComponentsThisprocedureappliestoMFCsusedinsemiconductor92071220B-STDÑSEMATECHGuidetoProvisionalgassystems.TestMethodsforMassFlowContro

3、llers3Limitations92071222B-STDÑSEMATECHProvisionalTest3.1ThisprocedureistobeusedonlyinconjunctionMethodforDeterminingReproducibilityandZerowithanotherexistingparametrictestformassßowDriftforThermalMassFlowControllerscontrollerstoobtainthereliabilitydataforthatparticu-92071226BÐSTDÑSEMATECHProvisiona

4、lTestlarparametrictest.MethodforDeterminingParticleContributionbyMass3.2NewMFCsshallbeusedforreliabilitytesting.FlowControllersAnMFCthathasbeenputthroughthistestmethod4.3OtherDocumentmaybetestedforreliabilityagain.Nelson,Wayne,AppliedLifeDataAnalysis,New3.3Inadditiontothisprocedure,theparametrictest

5、York,NYWiley,1982(seeAnnex)mayalsocyclethevalve.Thesecyclesshouldbeignoredfordeterminingthecumulativecyclesthatare5Terminologydescribedinthedatatable.5.1Acronyms3.4Thistestwillnotaddressrootcauseanalysisof5.1.1MFCÑMassßowcontrollerfailures.5.1.2UHPÑUltra-highpurity3.5Readpointshavebeenselectedforthi

6、stestproce-duresothatthetestwilltakeapproximatelysixmonths5.2DeÞnitionstocomplete.Thereadpointschedulegivenisonlya5.2.1cycleÑArepeatingsequenceofsetpointssuggestedscheduleandiftheuserfeelsthatadifferentappliedtotheMFC.readpointschedulewouldbettersuithisneeds,thistestmethodcanstillbeusedtoobtainrelia

7、bilitydata.5.2.2hardfailureÑAcatastrophicmechanicalfail-ureorelectricalfailurethatresultsinaninoperable4ReferencedDocumentsMFC,oradeviationfromauser-deÞnedspeciÞcationthatresultsinaconditionthatmakest