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1、SensorsandActuatorsB125(2007)126130Acetonevapoursensingcharacteristicsofcobalt-dopedSnO2thinfilmsShriramB.Patila,P.P.Patila,MahendraA.Moreb,∗aDepartmentofPhysics,SchoolofPhysicalSciences,NorthMaharashtraUniversity,Jalgaon425001,IndiabCenterforAdvancedStu
2、diesinMaterialScienceandSolidStatePhysics,DepartmentofPhysics,UniversityofPune,Pune411007,IndiaReceived3September2006;receivedinrevisedform30January2007;accepted30January2007Availableonline6February2007AbstractGassensingbehaviourofcobalt-dopedtinoxide(C
3、oSnO2)thinfilms,synthesizedbyconventionalspraypyrolysistechnique,hasbeeninvestigatedforcarbondioxide,oxygenandacetonevapour.StructuralandelementalanalysisoftheCoSnO2filmswascarriedoutbyX-raydiffraction(XRD),scanningelectronmicroscopy(SEM)andenergydispersi
4、veX-rayspectroscopy(EDAX).TheXRDspectrumrevealedthepolycrystallinenatureofthefilmwithamixedphasecomprisingofSnO2andCo3O4.Thesurfacemorphology,asseenintheSEMimage,wasobservedtobegranular,uniformlycoveringtheentiresubstratesurface.Thegas/vapoursensingstudi
5、esperformedindryairatdifferenttemperaturesintherangeof50300◦Cindicatedbettersensingcharacteristicsforacetonevapourascomparedtocarbondioxideandoxygengases.Theinfluenceofcobaltconcentrationandoperatingtemperatureonthesensorperformancehasalsobeeninvestigate
6、d.©2007ElsevierB.V.Allrightsreserved.Keywords:Gassensor;Spraypyrolysis;Acetonevapour;SnO2;Co3O41.Introductiontionresponsibleforthesensingmechanism[810].However,thecomplexityinvolvedinthesynthesisprocessandneedofOveraperiodofthreedecades,metaloxidesemico
7、nduc-advancedcharacterizationtechniqueslimittheapplicabilityoftorbasedsensorshavebeenunderextensiveinvestigationsduethenanomaterialbasedsensorsystems.Inthiscontext,thesim-totheirapplicationsinindustrialanddomesticsectors[13].pleandcosteffectiveconventio
8、nalsynthesistechniques,suchAmongstthelargenumberofmetaloxides,particularlySnO2,asvacuumevaporation,sputtering,chemicalbathdeposition,ZnO,WO3andTiO2havebeenthematerialsofchoiceinmostspraypyrolysis,etc.,usedformakingthinfilmsensorsa
