Zinc oxide thin film gas sensor for detection of acetone

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1、JOURNALOFMATERIALSSCIENCE40(2005)4383–4385LETTERSZincoxidethinfilmgassensorfordetectionofacetoneP.P.SAHAYDepartmentofPhysics,NationalInstituteofTechnology,Silchar788010,IndiaInrecentyears,studiesonzincoxide(ZnO)filmshaveofacetonewerestudiedinthetemperaturerangebe-drawnconsiderableinteres

2、tbecauseoftheirgoodelec-tween250and375◦C.tricalandopticalproperties,incombinationwiththeirThesensitivityhasbeendefinedasthepercentagewidebandgap,abundanceinnature,andabsenceoftox-changeofthefilmresistanceinpresenceofacetone,icity.Theassortedphysicalpropertiessuchaselectro-andisgivenby[((

3、Ra−Rg)/Ra)×100%].Here,Raoptical,acousto-optical,piezoelectricalandlumines-istheelectricalresistanceofthefilminairandRgiscencecharacteristics,renderthethinfilmsofzincoxidetheresistanceafterexposuretoacetone.Aftergettingaliablematerialforavarietyofapplications.Zincoxideresponsetoacetone,th

4、efilmresistancebecomesstaticwithadirectbandgapof3.3eVatroomtemperature,andthesensitivitythencalculatedhasbeentermedasistransparenttomostofthesolarspectrum.ZnOthinsaturationsensitivity.filmshaveattractedinterestasawindowmaterialforFig.1showstheeffectofworkingtemperatureonsolarcells,alow-c

5、ostalternativetoITO,opticalwaveg-thesaturationsensitivityofZnOfilmtowardsacetoneuides,lightmodulators,gassensors,andetc.[1–6].vapour.Itisobviousfromthefigurethatworkingtem-Varioustechniqueshavebeenusedtopreparedopedperatureplaysavitalroleindeterminingthesensitiv-orundopedZnOfilms.Theseinc

6、ludemagnetronsput-ityofthefilm.Foraparticularconcentrationoface-tering,plasmaenhancedchemicalvapourdepositiontone,say1000ppm,thesensitivityfirstincreasesfrom(PECVD),spraypyrolysis,pulselaserdeposition,sol–6.8%to29.5%asthetemperatureisraisedfrom250togelprocess,vacuumevaporation,etc.[7–11]

7、.Inthe325◦C,andthendecreasesto22.7%whenthetemper-presentinvestigation,theauthorhasusedspraypyroly-atureisfurtherraisedto375◦C.Ingeneral,thereexistssistechniquetopreparethinfilmsofZnObecausethisanoptimumworkingtemperatureofasensortoachievetechniqueissimpleandinvolveslowcostequipments.t