A Thin-Film Heat Flux Sensor薄膜热流传染器

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1、AThin-FilmHeatFluxSensorFabricatedonCopperforHeatICOMM/4M2010TransferMeasurementsinParallelChannelHeatSinksNo.731234BenjaminA.Jasperson,FrankE.Pfefferkorn,WeilinQu,KevinT.Turner1BenjaminA.Jasperson;MechanicalEngr.,Univ.ofWisconsin-Madison,USA;bajasperson@wisc.edu2FrankE.Pfefferk

2、orn;MechanicalEngr.,Univ.ofWisconsin-Madison,USA;pfefferk@engr.wisc.edu3WeilinQu;MechanicalEngr.,Univ.ofHawaii-Manoa,USA;qu@hawaii.edu4KevinT.Turner;MechanicalEngr.,Univ.ofWisconsin-Madison,USA;kturner@engr.wisc.eduoptimizationofheatsinkdesign.ForsuchABSTRACTcharacterizationstu

3、dies,microscaleheatfluxsensorsAcombinationoflithography-basedmicrofabricationareneededtomeasurelocalheattransferphenomena.andmicroendmillingisusedtomanufacturethin-Themicroscaleheatfluxsensorsnecessaryinthesefilmresistancetemperaturedetectorheatfluxsensorssituationswillrequireco

4、mbinedmanufacturingonbulkcoppersubstrates.Thefabricationprocesstechniquestofacilitateintegrateddevicefabricationusesphotoresistpatterning,metaldeposition,andlift-onaminiaturescale.Thesetechniqueswillneedtoofftobuildthesensorandmicroendmillingtoembracefabricationontraditionalheat

5、sinkmaterials,segmentthedevices.Microendmillingtestsweresuchascopper,whichareutilizedfortheirhighperformedtodetermineconditionsforsensorthermalconductivity.Inregardstoheatfluxsensors,removalthatminimizeddelaminationandburrlithographicmethodsarewellsuitedforsensorformation.Itwasd

6、eterminedthatstartingonthefabricationonthisscale.Likewise,microendmillingbackside(oppositethesensor)ofthecopperwaferisamaterialremovalprocesscapableofmachiningandmachiningthroughtothethinfilmlayersresultedpolymers,metals,ceramicsandothermaterialsinintheleastamountofburrformation

7、.threedimensionsdowntothetensofmicrons[20].INTRODUCTIONAssuch,thegoalofthisworkistoexplorethepossibilityofcombininglithography-basedsensorHeatfluxistheamountofthermalenergypertimefabricationoncoppersubstrateswithmicroendtransferredthroughagivenarea[1].Heatfluxmilling,toproducein

8、tegratedsensorsonmicro-sensorstypicallyrelyonon