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1、TransparentconductingoxidefilmsforthinfilmsiliconphotovoltaicsW.Beyer,J.HüpkesandH.StiebigIEF-5Photovoltaik,ForschungszentrumJülichGmbH,D-52425Jülich,GermanyAbstractRequirementsforapplicationoftransparentconductingoxide(TCO)filmsinthinfilmsiliconsolarcellsarereviewedwithafocusonsputteredAldopedzinco
2、xidefilms.TCOfilmsareemployedasafrontcontactandaspartofahighlyreflectivebackcontactsothatthesiliconabsorberlayerisembeddedbyTCOfilms..OptoelectronicpropertiesofTCOlayersandtheirinfluenceonthesolarcellperformancearediscussed.Inaddition,recentresultsonstabilityissuesofsuchfilms,solarcellsandsolarmodul
3、esarepresented.Keywords:zincoxide,stability,solarcell,solarmodule,amorphoussilicon,microcrystallinesilicon1.IntroductionSiliconthinfilmsolarcellsarepresentlyproducedatalevelof80–100MWperyearwhichisabout5%oftheworldsolarcellproduction.Theyhaveanefficiencyoftypically5to7%andarepredominantlybasedonamor
4、phoussiliconastheabsorbermaterial.Inrecenttime,greateffortsareundertakenworldwidetodeveloptandemsolarcellswithamorphousandmicrocrystallineSiabsorberlayers.Forthistypeofsolarcells,moduleefficiencies>10%appearfeasible.InparticularinGermany,theup-scalingofthinfilmSisolarcellproductionisinprogress,asthe
5、installationofproductioncapacitanceofmorethan200MWperyearhasbeenannounced.Itishopedthatbymassproductionofthinfilmsiliconsolarcells,thepriceofphotovoltaicsbasedelectricitycanbereducedsignificantly.Besidesthesiliconabsorberlayers,transparentconductingoxide(TCO)filmsarealsoimportantcomponentsofthinfilm
6、Sisolarcells.SuchhighlyconductingTCOlayersarecommonlyusedascontactlayersofpinsolarcellstructures[1,2,3,4].Sincethelateralconductanceofdopedp/nsiliconlayersisnotsufficienttopreventresistivelossesovertypicaldistancesintherangeof1cm,aTCOfrontlayerisusedtoavoidahighseriesresistance[1].Furthermore,frontc
7、ontactTCOlayersservethepurposeof(i)aneffectivecouplingoflightintothesolarcellbyrefractiveindexmatchingand(ii)anefficientlighttrappingbyscatteringoflightintothesolarcellatroughTCO/siliconinterface.Also
