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1、AnIntroductiontotheTechnologyofThinFilmSiliconPhotovoltaicsA.Feltrin,R.Bartlome,C.Battaglia,M.Boccard,G.Bugnon,P.Bühlmann,O.Cubero,M.Despeisse,D.Dominé,F.-J.Haug,F.Meillaud,X.Niquille,G.Parascandolo,T.Söderström,B.Strahm,V.Terrazzoni,N.Wyrsch,C.BallifEcolePolytechn
2、iqueFédéraledeLausanne(EPFL),InstituteofMicroengineering(IMT),Photovoltaicsandthinfilmelectronicslaboratory,Breguet2,2000Neuchâtel,Switzerland.Abstract−Severalaspectsofthescienceandtechnologyofthinfilmsiliconforphotovoltaicapplicationswillbepresented.Thepotentialad
3、vantagesofthistechnologyovercrystallinewafertechnologywillbediscussed.Abasicunderstandingofthematerialpropertiesofthinfilmsiliconlayersenablestoassesstheirpotentialandlimitationswhenusedinphotovoltaicdevices.Abriefreviewoftheproductiontechnologyforthinfilmswillbegi
4、venwithparticularemphasisonamorphousandmicrocrystallinesilicon.Asforotherphotovoltaictechnologies,thepushforhigherefficiencyofthinfilmsilicondevicesisstrong.Anappealingfeatureofthesematerialsisthattheycanbeeasilyintegratedinmulti-junctiontandemdevices.Forinstance,s
5、tackingamorphousandmicrocrystallinesiliconthinfilmsinonetandemcell,themicromorphcell,increasestheefficiencywellabovethecharacteristicvaluesofsinglejunctioncells.TheInstituteofMicroengineering(IMT)hasbeenapioneerintheresearchanddevelopmentofthinfilmsiliconphotovolta
6、icsoverthelast20yearsandseverallatestdevelopmentsonarereviewed.siliconingotsdrawnfrommeltedsiliconincrucibles.1INTRODUCTIONThesewafersareprocessedinmultiplestepstoobtainsolarcellssuccessivelyassembledinmodules.ThinfilmsiliconphotovoltaicsisoneoftheThetechnologyused
7、inthinfilmsiliconisattheemergingtechnologiestoproduceelectricityfromopposite.Solarcellsareobtainedinthesocalledsunlight.Semiconductorslikeamorphoussilicon(a-bottom-upapproach:atomsofsiliconarestackedoneSi:H)andmicrocrystallinesilicon(µc-Si:H)formtheontopoftheothero
8、nasuitablesubstratetoformallbackboneofthistechnology.Theuseofa-Si:Hasathelayersofasolarcell.Othertechnologiesusethisphotovoltaicmaterialcanbetrac
