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1、DETERMININGOPTICALCONSTANTSFORThO2THINFILMSSPUTTEREDUNDERDIFFERENTBIASVOLTAGESFROM1.2TO6.5eVBYSPECTROSCOPICELLIPSOMETRYbyWilliamRayEvansSubmittedtoBrighamYoungUniversityinpartialfulfillmentofgraduationrequirementsforUniversityHonorsDepartmentofPhysicsan
2、dAstronomyBrighamYoungUniversityDecember2005Advisor:Dr.DavidD.AllredHonorsRepresentative:DeanJ.ScottMillerSignature:_________________________Signature:_________________________FacultyReferee:Dr.LawrenceReesSignature:_________________________111111ABSTRA
3、CTDETERMININGOPTICALCONSTANTSFORThO2THINFILMSSPUTTEREDUNDERDIFFERENTBIASVOLTAGESFROM1.2TO6.5eVBYSPECTROSCOPICELLIPSOMETRYWilliamR.EvansDepartmentofPhysicsandAstronomyBachelorofScienceIreportopticalconstants(nandk)between1.24and6.5eVofreactivelysputtered
4、ThO2thinfilmssputteredatbiasvoltagesof0,50,64,65,68and70V.Nosignificantdependencesinrefractiveindex(n)onbiasvoltageorfilmthicknessweredetected.Wefindnisdispersiveoverthefullrange,withvaluesof1.82±0.06,1.85±0.06,1.93±0.062.24±0.07,at1.2,2.5,4.0and6.0eVre
5、spectively.Anabsorptionfeatureatabout6.5eVinThO2ismostlikelyanarrowabsorptionbandwithafullwidthathalfmaximumofabout0.4eV.ii111ACKNOWLEDGEMENTSFirstofall,Iwouldliketothankmywife,Kristin,andtherestofmyfamily,especiallymyparentsRobertP.EvansandLorettaL.Eva
6、ns,whohaveallbeenanever-endingsourceofhelpandsupportduringthisproject.Iwouldalsoliketothankmyadvisor,Dr.DavidAllred,whohasmadethisprojectarealsuccess.Hisguidance,expertise,andencouragementhavemadethisentireprojectwhatitis.Iwouldalsoliketothankallthememb
7、ersoftheBYUthinfilmopticsgroup,pastandpresent,withoutwhosehelpandtrainingthiswouldnothavehappened.IfinallygratefullyacknowledgethedifferentsourcesofsupportandfundingShouldIlistthem.Idon’tknowwhy,butI’dratherleaveitkindofgeneral.thathavemadeallofthisposs
8、ible.iii111TABLEOFCONTENTSTitleandSignaturePage...............................................................................................iAbstract..............................................................................
