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1、SEMIE6-1296N/A©SEMI1982,1996FACILITIESINTERFACESPECIFICATIONSGUIDELINEANDFORMAT1Purpose5.1SEMIDocumentsThisguidelineisintendedtoassistsupplierswiththeSEMIC3ÑSpecificationsforGasescommunicationofinformationaboutthefacilitiesSEMIE1.1ÑStandardfor3inchPlastica
2、ndMetalneedsoftheirequipmenttothosewhoareresponsibleWaferCarriers,GeneralUsageforthefacilitiesdesignandtheequipmentinstallation.SEMIE1.2ÑStandardfor100mmPlasticandMetalThesuccessfulinstallationandoperationofsemicon-WaferCarriers,GeneralUsageductorequipment
3、isthemutualobjectiveoftheowneroftheequipment,theoperator,theinstaller,andtheSEMIE1.3ÑStandardfor125mmPlasticandMetalsupplier.Withinthesemiconductorindustry,thediver-WaferCarriers,GeneralUsagesityandcomplexityofequipmenthavecreatedsigniÞ-SEMIE1.4ÑStandardfo
4、r125mmPlasticandMetalcantproblemsforthosewhodesignthefacilitiesandWaferCarriers,AutoTransportUsageinstalltheequipment.ItisverydifÞculttostaycurrentwiththeever-changingrequirementsnecessaryforSEMIE1.5ÑStandardfor150mmPlasticandMetalindividualpiecesofequipme
5、nt.Asaresult,itisdifÞ-WaferCarriers,GeneralUsageculttoguaranteethatthefacilitieswillmeettheneedsSEMIE1.7ÑStandardfor200mmPlasticandMetalofeachpieceofequipment.WaferCarriers,GeneralUsage(Proposed)2ScopeSEMIE4ÑSEMIEquipmentCommunicationsStan-dard1MessageTran
6、sfer(SECS-I)Designandinstallationrequirementsvarywitheachownerandproject.Therefore,thisguidelineisSEMIE5ÑSEMIEquipmentCommunicationsStan-designedtocoverallactivitiesthatmaybeincludeddard2MessageContent(SECS-II)withequipmentinstallation.SEMIE7ÑSpecification
7、forElectricalInterfacesfortheU.S.Only3ImpactSEMIE8ÑSpecificationforWaferTransportSys-Anysupplierwhousesthisformatisexpectedtotems:InterfaceCoordinatesincludewithinthedocumentallrequirementsforthesitefacilities,equipmentshipping,installation,startup,SEMIE15
8、ÑSpecificationforToolLoadPortacceptancetest,andtraining.Thisisaguidingdocu-SEMIE19ÑStandardMechanicalInterface(SMIF)mentforthosewhodesignthefacilityandinstalltheequipment.TheformatistobeusedforalltypesofSEMIE
