SEMI C3-0699 SPECIFICATIONS FOR GASES

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1、SEMIC3-0699SPECIFICATIONSFORGASESIMPORTANTNOTICE:Thisspecificationisincomplete.Theincompletesectionsarenotedas“ToBeDetermined.”TheGasesCommitteehasagreedtopublishthissectionpriortocompletionasaservicetotheSemiconductorIndustry.Thisspecificationwastechnical

2、lyapprovedbytheGlobalGasesCommitteeandisthedirectresponsibilityoftheNorthAmericanGasesCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonFebruary28,1999.InitiallyavailableonSEMIOnLineApril1999;tobepublishedJune1999.Originallypubl

3、ishedin1986;previouslypublishedin1995.1.7Foramajorcomponent,thevalue(assayorpurity)1Prefaceshallbeexpressedasaminimumpermissiblelimit.For1.1Recognizingtheimportanceofimpuritycontentofanimpurity,thevalueshallbeexpressedasamaximumgasesinthemanufactureofsemic

4、onductors,supplierspermissiblelimit.respondedbyintroducingproductswithimproved1.8Agasconformingtothespecificationswillanalyticalcharacterization,notablyfortraceimpurities.commonlycontainmoreofthemajorcomponentthan1.2TheSEMIGasesCommitteebeganitseffortsinth

5、eminimumpermissiblelimitorcontainlessofanthespringof1979.Withthispublication,theimpurity(orseveralimpurities)thantheSEMIC3Committeeestablishesthedefinitions,generalmaximumpermissiblelimit.Inneithercaseshalltheprocedures,specifications,andanalyticalprocedur

6、esgasbeconsideredasofhigherqualitythanthatdefinedforthegaseslistedintheindex.bythespecification.1.3Productswhichmeetalloftherequirementsmay1.9Itisnotpracticaltoconsidereveryimpurityorbedescribedas“meetingSEMIspecifications.”contaminantthatmightbepresent.Fo

7、rcertainapplications,itisrecognizedthatmorestringentor1.4Whereananalyticalproceduredifferentfromthatadditionalspecificationsandproceduresmightbeprovidedissubstitutedbyasupplieroruser,theburdenrequired.Theintentofthesespecificationsandtheofproofisonsaidsupp

8、lierorusertoconfirmtheassociatedproceduresis,ononehand,toassurethataequivalency.Itshouldbenotedthatthefollowinglistofgasissuitableforthecommonusestowhichitmaybecriteriawasconsideredwhendeterminingthespecified