SEMI E19-0697 STANDARD MECHANICAL INTERFACE (SMIF)

《SEMI E19-0697 STANDARD MECHANICAL INTERFACE (SMIF)》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、SEMIE19-0697N/A©SEMI1991,1997STANDARDMECHANICALINTERFACE(SMIF)NOTE:Thisstandardhasbeenpurposelyrestrictedto100mm(4in.),125mm(5in.),and150mm(6in.)ver-sionsoftheSMIFport.ThishasbeendonetoestablishabaseforSMIFportstandardization.Aspectsofthe200mm(8in.)versionhavebeennego

2、tiatedbyinterestedpartiesandpublishedasSEMIE19.4.1IntroductionrialsInternational(SEMI)takesnopositionwithrespecttothevalidityofanypatentrightsassertedin1.1ScopeÑThisspeciÞcationdescribesoneconnectionwithanyitemmentionedinthisdocument.approachtointerfacingacleancassett

3、etransportboxUsersofthisdocumentareexpresslyadvisedthattoacleanenvironmentalhousingonapieceofsemi-determinationofanysuchpatentrightsandtheriskofconductorprocessingequipmentortoothercleanenvi-infringementofsuchrightsareentirelytheirownronments.Thesystemconceptinvolvesm

4、atingadoorresponsibility.onacassettecontainertoadooronanequipmentcan-opyandtransferringthecassetteinto,andoutof,the2ApplicableDocumentsequipmentwithoutexposingthecassetteandwaferstooutsidecontamination.2.1SEMIDocuments1.2PurposeÑAstandardinterfaceisrequiredforSEMIE1ÑS

5、pecificationfor3inch,100mm,containersintendedtocontrolthetransportenviron-125mm,and150mmPlasticandMetalWaferCarri-mentofcassettescontainingwafersordisks.Theinter-ersfacemustaddressthepropercontainerorientationforSEMIE15ÑSpecificationforToolLoadPortmaterialtransferandm

6、aintaincontinuitybetweenthecontainerandequipmentenvironmentinordertocon-3DeÞnitionstrolparticulatematter.(SeeFigure1forapictorialdepictionofmostterms.)1.3ImpactÑTheincorporationofthisstandardrequiresequipmentdesignerstoincludethefeaturesof3.1boxÑAnenvironmentallycontr

7、olledenclosuretheinterfaceintothetooldesign.Spacingbetweenforacassettecontainingwafersordisks.Forpurposesopencassetteportsisinadequateforincorporationofofthisstandard,aboxhasfeaturesthatconformtothethisinterface.Designersaredirectedtotherecommen-specifiedinterface.Abo

8、xincludesaboxdoorandboxdationsmadeinSEMIE15inthisregard.latches.(Aboxisalsoreferredtoasacontainer.)1.4LimitationsÑThisstanda