欢迎来到天天文库
浏览记录
ID:44112229
大小:147.56 KB
页数:5页
时间:2019-10-18
《SEMI E50-95 (Withdrawn 0600)INTEGRATED SMIF INDEXER APPLICATION》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、SEMIE50-95(Withdrawn0600)INTEGRATEDSMIFINDEXERAPPLICATIONMODELFORTHESENSOR/ACTUATORNETWORKNOTE:Thisdocumentwasballotedandapprovedforwithdrawalin2000.1Purpose5TerminologyThisstandarddefinesanapplicationleveldevicemodelforintegratedSMIFindexers.5.1pod—aboxhavingastandardmechanicalinterface
2、(SMIF).2Scope5.2integratedSMIFindexer—deviceincludingaThescopeofthisspecificationistoensuretheSMIF-compatibleportplateperSEMIE19andaportinteroperabilityofintegratedSMIFindexerswithdoorliftcapableofindexing/positioningverticallypersemiconductorprocessingequipmentcontrollersontheSEMIE48.ap
3、plicationlevel.Thisspecificationdefinesthe5.3standardmechanicalinterface(SMIF)—interfacecommandsaccepted,messagesprovided,andvariablesplanebetweenpodandanotherminienvironmentpermaintainedandsentonrequestbyanIntegratedSMIFSEMIE19.Indexer.ThisdocumentcomplementsSEMIE54Foralistofadditionalr
4、elateddefinitions,seeSEMI(Sensor/ActuatorNetworkStandard)andSEMIE54.1E44.(StandardforSensor/ActuatorNetworkCommonDeviceModel).6Requirements3Limitations6.1Commands—AnintegratedSMIFindexeris3.1ThisspecificationappliestoIntegratedSMIFrequiredtoacceptthecommandsdescribedbelow.AllIndexersonly
5、.commandsexcepttheRequestVariableValuecommandcanbereceivedbytheindexeronlyinthe3.2Thisspecificationdoesnotincludecapabilitiesthatidlestate(see6.4)andarerepliedtowiththerespectivearecommontoallsensors,actuators,andequipmentindexerreplydescribedin6.2,whentherelatedactivitysubcomponents.Com
6、moncapabilitiesarespecifiediniscompleted.TheRequestVariableValuecommandtheCommonDeviceModelreferencedbelow.canbereceivedbytheindexerintheidlestateandtheprocessingstateandisrepliedtowiththerespective4ReferencedDocumentsreply.4.1SEMIDocumentsTable1DescriptionSEMIE5—SEMIEquipmentCommunicati
7、onsStandardIICmdName—Nameofthecommandtobeprovided.CmdVariable—VariabletowhichthecommandvalueSEMIE19—StandardMechanicalInterface(SMIF)iswrittenbythehost.SEMIE44—GuideforProcurementandAcceptanceCmdFormat—Formatofthecommand.ofMinienvironmentsCmdValue—Variablevaluerepresentin
此文档下载收益归作者所有