SEMI E50-95 (Withdrawn 0600)INTEGRATED SMIF INDEXER APPLICATION

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1、SEMIE50-95(Withdrawn0600)INTEGRATEDSMIFINDEXERAPPLICATIONMODELFORTHESENSOR/ACTUATORNETWORKNOTE:Thisdocumentwasballotedandapprovedforwithdrawalin2000.1Purpose5TerminologyThisstandarddefinesanapplicationleveldevicemodelforintegratedSMIFindexers.5.1pod—aboxhavingastandardmechanicalinterface

2、(SMIF).2Scope5.2integratedSMIFindexer—deviceincludingaThescopeofthisspecificationistoensuretheSMIF-compatibleportplateperSEMIE19andaportinteroperabilityofintegratedSMIFindexerswithdoorliftcapableofindexing/positioningverticallypersemiconductorprocessingequipmentcontrollersontheSEMIE48.ap

3、plicationlevel.Thisspecificationdefinesthe5.3standardmechanicalinterface(SMIF)—interfacecommandsaccepted,messagesprovided,andvariablesplanebetweenpodandanotherminienvironmentpermaintainedandsentonrequestbyanIntegratedSMIFSEMIE19.Indexer.ThisdocumentcomplementsSEMIE54Foralistofadditionalr

4、elateddefinitions,seeSEMI(Sensor/ActuatorNetworkStandard)andSEMIE54.1E44.(StandardforSensor/ActuatorNetworkCommonDeviceModel).6Requirements3Limitations6.1Commands—AnintegratedSMIFindexeris3.1ThisspecificationappliestoIntegratedSMIFrequiredtoacceptthecommandsdescribedbelow.AllIndexersonly

5、.commandsexcepttheRequestVariableValuecommandcanbereceivedbytheindexeronlyinthe3.2Thisspecificationdoesnotincludecapabilitiesthatidlestate(see6.4)andarerepliedtowiththerespectivearecommontoallsensors,actuators,andequipmentindexerreplydescribedin6.2,whentherelatedactivitysubcomponents.Com

6、moncapabilitiesarespecifiediniscompleted.TheRequestVariableValuecommandtheCommonDeviceModelreferencedbelow.canbereceivedbytheindexerintheidlestateandtheprocessingstateandisrepliedtowiththerespective4ReferencedDocumentsreply.4.1SEMIDocumentsTable1DescriptionSEMIE5—SEMIEquipmentCommunicati

7、onsStandardIICmdName—Nameofthecommandtobeprovided.CmdVariable—VariabletowhichthecommandvalueSEMIE19—StandardMechanicalInterface(SMIF)iswrittenbythehost.SEMIE44—GuideforProcurementandAcceptanceCmdFormat—Formatofthecommand.ofMinienvironmentsCmdValue—Variablevaluerepresentin