SEMI S10-1296 SAFETY GUIDELINE FOR RISK ASSESSMENT

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1、SEMIS10-1296N/A©SEMI1996SAFETYGUIDELINEFORRISKASSESSMENT1PurposeForexample,theriskassessmentforahazardthatcancrediblyresultindisablinginjuryandmayoccuronce1.1Thisdocumentprovidesamethodforassessingayearwouldbe2C(Severe/Possible),whileamoder-theriskassociatedwithanyhazardandforranking

2、dif-atehazardthatislikelytooccurmorethanfivetimesferenthazardsaccordingtotheriskstheypresent.Theperyearwouldhaveariskassessmentof3A.methodcanbeusedtodifferentiatebetweenthosehaz-ardswhichareacceptableandotherswhichrequireNOTE1:Nostandardizedcriteriaforseverityorlikeli-furthermitigatio

3、ntoreducetheirrisktoacceptablehoodgroupingsexist;usersshoulddevelopgroupingslevels.thatareconsistentwiththeirownorganization'shazardcontrolobjectivesandsafetypolicies.2ScopeNOTE2:Likelihoodandseveritymayvary,depending2.1Thismethodisapplicabletohazardsassociatedontheactivityphase(e.g.

4、operation,maintenanceorwithsemiconductorfacilities,processesandmanufac-service.)turingequipment.Itisusedtoevaluatetheriskspre-5.2RiskAssessmentMatrix—Onceahazard'sriskissentedbyidentifiedhazardsandprovidesconsistentdetermined,decisionscanbemadeaboutwhetherthebasisforprioritizingcorrec

5、tiveactionandallocatingofriskisacceptableorwhetherfurthermitigationisnec-limitedresourcesaccordingtotherisksthosehazardsessary.TheRiskAssessmentMatrix(suchasthepresent.exampleshowninFigure1)isatoolformakingthisjudgmentinaconsistent,repeatableway.3ReferencedDocumentsNone.Theriskassess

6、mentcategoriestendtogrouptogetherhazardswithsimilarlosspotentials(e.g.,rarecata-4Terminologystrophiclossandafrequentminorloss).ThecontoursshowninFigure1arenotstandardizedandusers4.1hazard—Aconditionthatisaprerequisitetoashoulddefinethematrixtosuittheirspecificriskmishap.assessmentcrite

7、ria.4.2likelihood—TheexpectedfrequencywithwhichaBesidesestablishingtheriskassessmentcategoryforamishapwilloccur.Usuallyexpressedasarate(e.g.,singlehazard,thematrixcanbeusedtocompareandeventsperyear,perproduct,perwaferprocessed).prioritizedifferentrisks.Thismakesiteasiertoiden-4.3mish

8、ap—Anunplann