SEMI C34-0699 SPECIFICATION AND GUIDELINE FOR MIXED ACID ETCHANTS

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1、SEMIC34-0699SPECIFICATIONANDGUIDELINEFORMIXEDACIDETCHANTSThisspecificationandthisguidelineweretechnicallyapprovedbytheGlobalProcessChemicalsCommitteeandarethedirectresponsibilityoftheNorthAmericanProcessChemicalsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeon

2、April23,1999.InitiallyavailableonSEMIOnLineMay1999;tobepublishedJune1999.ThisdocumentreplacesSEMIC2.1andC7.19intheirentirety.Originallypublishedin1981and1995respectively.49%hydrofluoricacid,andglacialaceticacid,1Purposerespectively.1.1Thepurposeofthisdocumentistostandardizerequirementsform

3、ixedacidetchantsusedinthe7TolerancessemiconductorindustryandtestingprocedurestoNitricAcid:±1.0%(±0.16meq/g)supportthosestandards.TestmethodshavebeenshownHydrofluoricAcid:±0.5%(±0.25meq/g)togivestatisticallyvalidresults.ThisdocumentalsoAceticAcid:±1.0%(±0.17meq/g)providesguidelinesforgrades

4、ofmixedacidetchantsforwhichaneedhasbeenidentified.Inthecaseofthe8Requirementsguidelines,thetestmethodsmaynothavebeenstatisticallyvalidatedyet.8.1TherequirementsformixedacidetchantsforGrade1andTierAarelistedinTable1.2Scope9Grade1Procedures2.1Thescopeofthisdocumentisallgradesofmixedacidetcha

5、ntsusedinthesemiconductorindustry.9.1TotalAcidity—Accuratelyweighasamplecontaining30to40milliequivalentsofacidityina3Limitationspolyethyleneweighingbottle.Transferwithwatertoa250mLpolyethylenebeakeranddiluteto3.1None.approximately100mL.Add10dropsofphenolphthaleinindicatorsolutionandtitrate

6、with1N4ReferencedDocumentsstandardizedsodiumhydroxidetoafaintpinkendSEMIC1—SpecificationsforReagentspoint.Calculatethetotalacidity(A):SEMIC2—SpecificationsforEtchantsmL´NofNaOHTotalAcidity()meq==AgWeightofsampleg()5Terminology9.2HydrofluoricAcid—Accuratelyweighasamplemixedacidetchant—anyco

7、mbinationofnitric,containing0.3to0.5gofhydrofluoricacidinahydrofluoric,andaceticacidswiththerelativepolyethyleneweighingbottle.Transferwithwatertoacompositionexpressedintermsofvolumesof70%polyethylenebeakeranddilutetoapproximately100nitricacid,49%hydrofluorica