资源描述：
《SEMI C48-0699E SPECIFICATION AND GUIDELINE FOR 1,1,1-TRICHLOROETHANE》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。
1、ESEMIC48-0699SPECIFICATIONANDGUIDELINEFOR1,1,1-TRICHLOROETHANE*,FURNACEGRADEThisspecificationandthisguidelineweretechnicallyapprovedbytheGlobalProcessChemicalsCommitteeandarethedirectresponsibilityoftheNorthAmericanProcessChemicalsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStand
2、ardsCommitteeonApril23,1999.InitiallyavailableonSEMIOnLineMay1999;tobepublishedJune1999.ThisdocumentreplacesSEMIC1.26andC7.15intheirentirety.Originallypublishedin1988and1991respectively.EThisdocumentwaseditoriallymodifiedinMarch2000.ChangesweremadetothetablefollowingSection8.1.*CAUTION:Reactsv
3、iolentlywithAluminumandwhite8Grade1Proceduresmetalsandisnottobeusedforvapordegreasing.(Contains8.1Assay—Determinetheassayusingasuitablegaslessthan0.05%inhibitors.)chromatograph.Integratetheareasunderallstabalizerandimpuritypeaksandthe1,1,1-trichloroethanepeak.1PurposeApplyappropriateresponsefa
4、ctorsforthecolumnand1.1Thepurposeofthisdocumentistostandardizedetectorsystemtocorrecttheresultsfromareapercentrequirementsfor1,1,1-trichloroethane,furnacegradetoweightpercent.Theassayshallnotbelessthanusedinthesemiconductorindustryandtesting99.9%byweight(seeSEMIC1,Section3.1,procedurestosuppor
5、tthosestandards.TestmethodsGuidelinesforAssaybyWideBoreColumnGashavebeenshowntogivestatisticallyvalidresults.ThisChromatography).Theparameterscitedhavegivendocumentalsoprovidesguidelinesforgradesof1,1,1-satisfactoryresults.trichloroethane,furnacegradeforwhichaneedhasNOTE1:Calibrationstandardto
6、bedeterminedbetweenbeenidentified.Inthecaseoftheguidelines,thetestsupplieranduser.methodsmaynothavebeenstatisticallyvalidatedyet.Column:30meter×530micronI.D.fusedsilica2Scopecapillary,coatedwith5micronfilmofDB-1orequivalent(100%methylsiliconewhichhasbeen2.1Thescopeofthisdocumentisallgradesof1,
7、1,1-surfacebondedandcrosslinked).trichloroethane,furnacegradeusedinthesemiconductorindustry.ColumnTemperature:40°Cisothermalfor5minutes,thenprogrammedto200°Cat10°C/min.3LimitationsInjectorTemperature:150°C3.1None.DetectorTemperature:250
