SEMI C26-0699E SPECIFICATION AND GUIDELINE FOR HEXAMETHYLDISILAZANE

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1、ESEMIC26-0699SPECIFICATIONANDGUIDELINEFORHEXAMETHYLDISILAZANE(HMDS)ThisspecificationandguidelineweretechnicallyapprovedbytheGlobalProcessChemicalsCommitteeandarethedirectresponsibilityoftheNorthAmericanProcessChemicalsCommittee.CurrenteditionapprovedbytheNorth

2、AmericanRegionalStandardsCommitteeonApril23,1999.InitiallyavailableonSEMIOnLineMay1999;tobepublishedJune1999.ThisdocumentreplacesSEMIC1.23andC7.10intheirentirety.Originallypublishedin1983and1991respectively.EThisdocumentwaseditoriallymodifiedinApril2000tocorre

3、ctaformattingerror.ChangesweremadetoTable1.1PurposeColumn:30meter×530miconI.D.fusedsilicacapillary,coatedwith5micronfilmofDB-1or1.1Thepurposeofthisdocumentistostandardizeequivalent(100%methylsiliconewhichhasbeenrequirementsforhexamethyldisilazaneusedinthebonde

4、dandcrosslinked).semiconductorindustryandtestingprocedurestosupportthosestandards.TestmethodshavebeenshownColumnTemperature:40°Cisothermalfor2minutes,togivestatisticallyvalidresults.Thisdocumentalsothenprogrammedto220°Cat10°C/min,andisothermalprovidesguideline

5、sforgradesofhexamethyldisilazanefor10minutes.forwhichaneedhasbeenidentified.Inthecaseoftheguidelines,thetestmethodsmaynothavebeenInjectorTemperature:200°Cstatisticallyvalidatedyet.DetectorTemperature:300°C2ScopeSampleSize:0.4µLCarrierGas:Heliumat8mL/min2.1Thes

6、copeofthisdocumentisallgradesofDetector:ThermalConductivityhexamethyldisilazaneusedinthesemiconductorApproximateRetentionTimes(min):industry.Hexamethyldisilazane14.33Limitations8.2TrailingImpurities—Usethechromatogram3.1None.developedintheassay(seeSection8.1).

7、Withtherelativeretentiontimeforhexamethyldisilazanetaken4ReferencedDocumentsas1.0,establishtheintegratedareapercentsfortrailingSEMIC1—SpecificationsforReagentsimpuritieswithrelativeretentiontimesfrom1.3to4.0.Thetotalofsuchtrailingimpuritiesshouldnotexceed0.1%.

8、5Terminology8.3Appearance—Place15mLofthesampleina205.1None.×150mmtesttubeandcomparewithwaterinasimilartube.Viewedacrossthecolumnbymeansof6PhysicalProperties(forinformationonly)tran