LDMOS 代码 Sprocess

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1、#----------------------------------------------------------------------##LDMOSexample#----------------------------------------------------------------------##header#----------------------------------------------------------------------#graphicsoncmd="plot.2dgridgas"setXmax10.0setYmax11.0setadapt@

2、adapt@setDEBUG0;#DEBUG=1willsaveadditionalintermediate;#structuresforversification.setdiff_info1;#diff_info=3willincludeaverydetailedlog;#withrespecttodiffusionoutputsetimpl_info1;#impl_info=3willincludeaverydetailedlog;#withrespecttoimplantationoutputprocUserImpPostProcess{SpeciesNameEnergyDoseM

3、odelIFacVFacCDose}{pdbSetDoubleDiffuseInitTimeStep1.0}procUserDiffPostProcess{}{pdbSetDoubleDiffuseInitTimeStep60.0}refineboxclear#refineboxinterface.materials="Silicon"#----------------------------------------------------------------------##endheader#---------------------------------------------

4、-------------------------##----------------------------------------------------------------------##Timesteppingcontrols#----------------------------------------------------------------------#pdbSetDiffusedThickness0.002pdbSetDiffusedThicknessEpi0.5pdbSetDiffuseMaxGrowthStep100.0pdbSetDiffuseIncre

5、aseRatio5.0pdbSetSiGridepi.perp.add.dist5e-5pdbSetOxideGridperp.add.dist5e-6pdbSetDoubleDiffuseInitTimeStep60.0#----------------------------------------------------------------------##Adaptivemeshingcontrols#----------------------------------------------------------------------#if{$adapt==1}{refi

6、nebox!keep.linespdbSetGridAdaptive1pdbSetDiffuseDiffuse.Regrid.Steps10pdbSetDiffuseGrowth.Regrid.Steps50pdbSetDiffuseEpi.Regrid.Steps-1#pdbSetGridRefine.Factor{2.02.0}pdbSetGridRefine.Percent0.1pdbSetGridUnrefine.Percent75pdbSetGridDamageRefine.TypeintervalpdbSetGridDamageRefine.Min.Value1.15e22p

7、dbSetGridDamageRefine.Max.Value1.15e22pdbSetGridDamageRefine.Target.Length0.01pdbSetGridDamageRefine.Target.Length.Scaling10.0}#----------------------------------------------------------------------##SelectthenewMGoals