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ID:38495699
大小:21.75 KB
页数:10页
时间:2019-06-13
《LDMOS 代码 Sprocess》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、#----------------------------------------------------------------------##LDMOSexample#----------------------------------------------------------------------##header#----------------------------------------------------------------------#graphicsoncmd="plot.2dgridgas"setXmax10.0setYmax11.0setadapt@
2、adapt@setDEBUG0;#DEBUG=1willsaveadditionalintermediate;#structuresforversification.setdiff_info1;#diff_info=3willincludeaverydetailedlog;#withrespecttodiffusionoutputsetimpl_info1;#impl_info=3willincludeaverydetailedlog;#withrespecttoimplantationoutputprocUserImpPostProcess{SpeciesNameEnergyDoseM
3、odelIFacVFacCDose}{pdbSetDoubleDiffuseInitTimeStep1.0}procUserDiffPostProcess{}{pdbSetDoubleDiffuseInitTimeStep60.0}refineboxclear#refineboxinterface.materials="Silicon"#----------------------------------------------------------------------##endheader#---------------------------------------------
4、-------------------------##----------------------------------------------------------------------##Timesteppingcontrols#----------------------------------------------------------------------#pdbSetDiffusedThickness0.002pdbSetDiffusedThicknessEpi0.5pdbSetDiffuseMaxGrowthStep100.0pdbSetDiffuseIncre
5、aseRatio5.0pdbSetSiGridepi.perp.add.dist5e-5pdbSetOxideGridperp.add.dist5e-6pdbSetDoubleDiffuseInitTimeStep60.0#----------------------------------------------------------------------##Adaptivemeshingcontrols#----------------------------------------------------------------------#if{$adapt==1}{refi
6、nebox!keep.linespdbSetGridAdaptive1pdbSetDiffuseDiffuse.Regrid.Steps10pdbSetDiffuseGrowth.Regrid.Steps50pdbSetDiffuseEpi.Regrid.Steps-1#pdbSetGridRefine.Factor{2.02.0}pdbSetGridRefine.Percent0.1pdbSetGridUnrefine.Percent75pdbSetGridDamageRefine.TypeintervalpdbSetGridDamageRefine.Min.Value1.15e22p
7、dbSetGridDamageRefine.Max.Value1.15e22pdbSetGridDamageRefine.Target.Length0.01pdbSetGridDamageRefine.Target.Length.Scaling10.0}#----------------------------------------------------------------------##SelectthenewMGoals
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