SEMI E26-92 (Reapproved 0699) RADIAL CLUSTER TOOL FOOTPRINT

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1、SEMIE26-92(Reapproved0699)RADIALCLUSTERTOOLFOOTPRINTSTANDARDThisstandardwastechnicallyreapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.Currenteditionreapproved

2、bytheNorthAmericanRegionalStandardsCommitteeonFebruary28,1999.PostedtoSEMIOnLineApril1999;tobepublishedJune1999.Originallypublishedin1992.Minoreditorialchangesweremadetothisdocumenttoconformtoeditorialguidelines.definedinSEMIE22)intersectatacommonpoi

3、nt1Introductionwithinthetransportmodule(asdefinedinSEMIE21).1.1Scope—Thestandardspecifiesthefootprintswithinwhichthemodulesofaradialclustertoolmust4Requirementsbeaccommodatedandtherestrictedareasbetweensuch4.1ModuleFootprintDescription—Thefootprintfo

4、otprints.Thestandardalsoappliestothoseportionswithinwhichmodules(asdefinedinSEMIE21)ofnonradialclustertoolsthatpossessradialelements.attachedtothetransportmodulemustbeThestandardislimitedtowafers200mm(8in.)inaccommodatedisillustratedinFigure1.Thevari

5、ablesdiameterorsmaller.aregiveninTable1anddefinedinTable2(see1.2Purpose—ThepurposeofthestandardistoSectionsR1-1throughR1-6).ensurethatmodulesfromdifferentsupplierscanbe4.2RestrictedAreas—Modulesshallnotintrudeintegratedintoaradialclustertool.Itprovid

6、esdesignupontheshadedregionbetweenadjoiningmodulespecificationstoequipmentmanufacturerssothatfootprintsinFigure1(seeSectionR1-7).Furthermore,physicalinterferencebetweenadjacentmodulesinautilitiesarerestrictedfromenteringthemodulethroughradialclustert

7、oolisavoidedandaccesstoallmodulestheverticalplanesborderingthemodulefootprint(seeoftheclustertoolisguaranteed.SEMIE25).1.3Impact—Thestandardrequiresequipment4.3RestrictiononAlpha—Thevaluesofalpha(seedesignerstoensurethatmodulesattachedtoatransportTab

8、le1)arerestrictedto36°ÿÿ90°(seeSectionR1-modulebeconfinedwithinaspecificfootprintandits8).verticalboundaries.4.4ModuleConnectandDisconnect—Spacefor2ReferencedDocumentsmoduleconnecttoanddisconnectfromthetransportmoduleandforanyrelatedtoolsmustbeprovi