SEMIE16-90(Reapproved0699)GUIDELINEFORDETERMINING.pdf

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1、SEMIE16-90(Reapproved0699)GUIDELINEFORDETERMININGANDDESCRIBINGMASSFLOWCONTROLLERLEAKRATESThisGuidelinewastechnicallyapprovedbytheGlobalFacilitiesCommitteeandisthedirectresponsibilityoftheNorthAmericanFacilitiesCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitt

2、eeonDecember18,1998.InitiallyavailableonSEMIOnLineFebruary1999;tobepublishedJune1999.Originallypublishedin1990;previouslypublishedin1996.EditorialchangesweremadetoSections4.2.2,4.3.1,and4.3.2.atm-cc/s(He)="atmosphericcubiccentimetersper1Purposesecond,helium"1.1Thepurposeofthisguideli

3、neistoestablishaNOTE1:ThePascal(1Pa=1N/m2)isdefinedasthepressureuniform,worldwidemeansfordescribingandunitoftheinternationalunitsystemSI.Therefore,theSIunitsmeasuringleakratesofmassflowcontrollers.Theleakabovearepreferred.Atm-cc/sisacceptable,asitiswidelyintegrityofagasdeliverysystem

4、isimportanttousedinthesemiconductorindustry.maintainingproductqualityandperformance.Thisguidelineisintendedtopreventconfusionand3.2.1The"massspectrometerheliumleakdetector"ismisunderstandingbetweenmanufacturersandusers.Ingenerallyusedforleakratetestingofhighandmediumparticular,itdist

5、inguishesbetweenmechanicalandlevelvacuumapparatus.Unitsofsccs,Torr-L/s,andmdiffusionleakrates.bar-L/s,havebeenusedinthepastbutarenotencouraged.ReferencematerialsincludeMILSTD-2Scope202E,C-1.2.1Thisguidelinecontainsdefinitionsoftermsand3.3MeasuredLeakRate¾Theleakrateofagivenprocedures

6、fordeterminingtheLeakRatesofmassflowsystemmeasuredunderspecifiedconditionsandcontrollersasusedinthesemiconductorindustry.employingaspecifiedtestgas(helium).Forthepurposesofcomparisonwithratesdeterminedbyother3Definitionsmethodsoftesting,measuredleakratesmustbeconvertedtoequivalentsta

7、ndardleakrates.3.1Leak¾Apathorpathsinasealedsystemwhichwillpassheliumwhenapartialpressuredifferential3.4Sensitivity(MinimumDetectableLeakRate)¾exists.ApartialpressuredifferentialcanexistforThesmalleststandardleakratethataninstrument,heliumeventhoughatotalgaspressuredifferentialmaymet

8、hodorsystemi