SEMI E24-92 (Reapproved 0699) CLUSTER TOOL MODULE INTERFACE

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1、SEMIE24-92(Reapproved0699)CLUSTERTOOLMODULEINTERFACE:ISOLATIONVALVEINTERLOCKSSTANDARDThisstandardwastechnicallyreapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.CurrenteditionreapprovedbytheNorthAmericanReg

2、ionalStandardsCommitteeonFebruary28,1999.PostedonSEMIOnLineApril1999;tobepublishedJune1999.Originallypublishedin1992.Minoreditorialchangesweremadetothisdocumenttoconformtoeditorialguidelines.3.3InterlockLogic—Theinterlockistoconsistof1Introductiontwonormallyopenrelaysandassociatedactuation1.1Sco

3、pe—Thisstandardrequireshardwareinter-circuitryineachmodule.(SeeSectionR1-2.)locksthatgoverntheopeningandclosingoftheenvi-3.3.1FirstRelay—Onerelayenablesopeningoftheronmentalisolationvalve(s)attheinterfaceplanesofaisolationvalveoftheattachedmodule.Contactclosureclustertool.Thisstandardappliestoal

4、lmodulesofaindicatesasafecondition,enablingvalveopening.clustertool(asdefinedinSEMIE21).Contactopeningdisablesvalveopeningifthevalveis1.2Purpose—Thepurposeofthisstandardistoclosed.Contactopeningdoesnotcausethevalvetopreventanyopeningorclosingoftheisolationvalve(s)closeifthevalveisopen.(SeeSectio

5、nR1-3.)whichwouldresultinanunsafeconditionorpossible3.3.2SecondRelay—Theotherrelayenablesclosuredamagetomaterialorequipment.oftheisolationvalveoftheattachedmodule.Contact1.3Impact—Thisstandardrequiresclustertoolmod-closureindicatesasafecondition,enablingvalveulesupplierstoimplementtheinterlockan

6、dtodefineclosure.Contactopeningdisablesvalveclosureifthetheconditionsthattriptheinterlock.valveisopen.Contactopeningdoesnotcausethevalvetoopenifthevalveisclosed.2ReferencedDocuments3.3.3Monitoring—Situationscanarisewherethe2.1SEMIDocumentsmoduleAinterlockinhibitsanoperationofthevalveonSEMIE21—Cl

7、usterToolModuleInterface:moduleB,whenthatvalveisalreadyintheinhibitedMechanicalInterfaceandWaferTransportStandardcondition.ThispotentialconflictmustbedetectedandresolvedwithinmoduleB.(SeeSectionR1-3.)2.2OtherDocuments3.4Cont