SEMI E22-0697 CLUSTER TOOL MODULE INTERFACE TRANSPORT MODULE

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1、SEMIE22-0697N/A©SEMI1991,1997CLUSTERTOOLMODULEINTERFACE:TRANSPORTMODULEENDEFFECTOREXCLUSIONVOLUMESTANDARD1Introduction3.6transportmoduleendeffectorÑThatpartofthetransportmodulethatsupportsthewaferandcan1.1ScopeÑThestandarddescribesthevolumeextendbeyondtheinterf

2、aceplane(definedinSEMIwithinanyprocessorcassettemodulewhichshallbeE21).accessibletothetransportmoduleendeffectorinaclustertool.Thestandardislimitedtomoduleswhich3.7wafersupportplatformÑAslot,pedestal,orsetaccommodatewafersizesfrom100mmuptoandofpinsusedtoholdawa

3、ferinahorizontalattitude.including200mmindiameter.3.8wafertransportaxisÑThecenterlineoftrans-1.2PurposeÑThepurposeofthestandardistopro-portmoduleendeffectormotion.Thiscenterlineisvidesufficientdetailtoallowthetransportmoduleendsymmetricwiththewafertransportzone

4、asdescribedeffectortomovewaferstoandfromprocessandcas-inSEMIE21.settemodulesinaclustertoolwithoutmechanical3.9wafertransportpositionÑAlocationwithinainterference.processorcassettemodulewherethewaferisaccepted1.3ImpactÑTheadoptionofthestandardrequiresorpresented

5、bythetransportmoduleendeffector.Thisequipmentdesignerstoallowspecificunobstructedisalsothelocationofthewafercentroid.volumeswithinprocessandcassettemodulesforwafertransportandplacesrestrictionsonthedesignofthe4Requirementstransportmoduleendeffector.Somerestrict

6、ionsare4.1WaferTransportÑThewaferistobetransporteddependentonthewafersize.inahorizontalattitude(seeApplicationNoteA.1).2ApplicableDocuments4.2WaferTransportPlaneExclusionZoneÑTheexclusionzoneisillustratedinFigure1,andthevari-2.1SEMIDocumentsablesaredefinedinTab

7、le1andspecifiedinTable2SEMIE1ÑSpecificationfor3inch,100mm,125mm,(seeApplicationNoteA.2).TheclearareasbetweenBand150mmPlasticandMetalWaferCarriersandCandalongthewafertransportaxisarespecifiedtoallowthetransportmoduleendeffectortobeSEMIE21ÑClusterToolModuleInterf

8、ace:Mechan-retractedafterthewaferhasbeenplacedonthesupporticalInterfaceandWaferTransportStandardplatformintheprocessorcassettemodule.Theright-hatched(////)areadenotestheexcl