SEMI E15-0698 SPECIFICATION FOR TOOL LOAD PORT

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1、SEMIE15-0698N/A©SEMI1990,1998SPECIFICATIONFORTOOLLOADPORT1Purpose5.1.3cassettecentroidÑAdatumrepresentingthetheoreticalcenterofastackofwafersinacassetteThisstandardisintendedtounifytheinterfaceformedbythepocketcenterlineandthe"center"betweenprocess/inspectiontoolsandautomated

2、waferpocketasdefinedbythelocationassociatedwithcarriertransportsystemswhilemaintainingcompati-dividingdimensionB3bytwo(seeSEMIE1,Figurebilitywithhumantransport.1).2Scope5.1.4cassetteenvelopeÑArectangularvolumewithverticalsideswhichcompletelycontainsacassette,ThisspeciÞcationd

3、ealswiththemechanicalinterfaceevenifthecassetteistilted(seeFigure1).(loadport)forwafercarriertransferbetweenwafercarriermaterialtransportsystems,includinghumans,5.1.5enclosedloadportÑAloadportwithoverheadandwaferfabrication/inspectionequipment(tools).clearanceobstructedbythet

4、ool.TheconceptdeÞnestheplacementandorientationofa5.1.6globalorientationÑThegeneralorientationofwafercarrieronatooltoallowreasonableinterfacingawafercarrierinatool;maybeverticalorhorizontal.withmechanizedmaterialmovementsystemswithoutcompromisinghumanaccesstoperformthematerial

5、5.1.7loaddepthÑThehorizontaldistancefromtheexchangefunction.loadfaceplanetocassettecentroidorcarriercentroid(seeFigures2and3(D)).3Impact5.1.8loadfaceplaneÑThefurthestphysicalverticalCompliancewiththisspeciÞcationrequirestheplace-boundaryplanefromcassettecentroidorcarriercen-m

6、entofloadportsontoolstospeciÞcheights,orienta-troidontheside(orsides)ofthetoolwhereloadingoftions,andloaddepths.Restrictionsarealsoplacedonthetoolisintended(seeFigures2and3).clearancestoobstructionswhichmaybeadjacentto5.1.9loadheightÑThedistancefromthebottomofsuchports.thecas

7、setteorcarriertothefloorattheloadfaceplane(seeFigure3(H)).4ReferencedDocuments4.1SEMIDocuments5.1.10loadportÑTheinterfacelocationonatoolwherewafercarriersaredelivered.ItispossiblethatSEMIE1ÑSpecificationfor3inch,100mm,125wafersarenotremovedfrom,orinsertedinto,thecar-mm,and150

8、mmPlasticandMetalWaferCarriersrieratthislocation.SEMIE1.7ÑStandardfo