SEMI E25-92 (Reapproved 0699) CLUSTER TOOL MODULE INTERFACE

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1、SEMIE25-92(Reapproved0699)CLUSTERTOOLMODULEINTERFACE:MODULEACCESSGUIDELINEThisguidelinewastechnicallyreapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.CurrenteditionreapprovedbytheNorthAm

2、ericanRegionalStandardsCommitteeonFebruary28,1999.PostedtoSEMIOnLineApril1999;tobepublishedJune1999.Originallypublishedin1992.Minoreditorialchangesweremadetothisdocumenttoconformtoeditorialguidelines.SEMIE21;thus,atransportmodulepossessesmultiple1Introductioninboardplanes.Theo

3、utboardsurfaceisparalleltothe1.1Scope—Thisguidelinespecifiesanenvelopeinterfaceplaneandnormallycoincideswiththatpartofwithinwhichaclustertoolmoduleissituated.Entrythemodulewhichisfarthestfromtheinterfaceplane.andexitlocationsthroughtheenvelopeandconnectionEachsideofthemoduleen

4、velopeconsistsofseverallocationstothemoduleforutilitiesandfacilityservicesverticalplanes.Thebottomsurfacegenerallycoincidesarerecommended.withthefloor,andthetopisahorizontalplanethatcon-tainsthehighestpointofthemodule.1.2Purpose—Thepurposeoftheclustertoolmoduleaccessguidelinei

5、stoprovideassistanceintheplace-3.3Inthesectionsthatfollow,thedistinctionbetweenmentofutilitiesandfacilityservicestoclustertoolthephysicalmoduleandthespacereservedforthemodulesinordertoimproveaccessformaintenancemodulewithintheenvelopemustbekeptinmind.Sec-andserviceandtosimplif

6、yclustertoolinstallation.tion4referstowhereutilitylinespenetratetheenve-lope,andSection5referstoconstraintsonwherethese1.3Impact—Thisguidelinerecommendsthatequip-linesconnecttothephysicalmodule.mentdesignslimittheplacementofutilitylinesandfacilityservicestospecificportionsofth

7、emodule4AllocationofModuleEnvelopeSurfacesenvelope.4.1Theallocationofsurfacesissubjecttotheneedfor1.4Exceptions—Localsafetyregulationsmustaccesstotheinterfaceplane,modulemovement,main-alwaystakeprecedenceoverthisguideline.Localtenanceaccessspace,andprotectionofmodulecompo-cond

8、itionsmayjustifyexceptionstothisguideline.nents(particularlye