SEMI C10-0299 GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS

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1、SEMIC10-0299GUIDEFORDETERMINATIONOFMETHODDETECTIONLIMITSNOTE:ThedocumentthatwaspreviouslydesignatedasSEMIC10(GuideforDeterminationofMethodDetectionLimitsforTraceMetalAnalysisbyPlasmaSpectroscopy)hasbeenredesignatedasSEMIC10.1.BecausetheGuideforDeterminationofMethod

2、DetectionLimitsistheparentdocument,ithasbeendesignatedasSEMIC10.adjustedforinstrumentsensitivitybypre-1.Purposeconcentrationordilution,ifapplicable.1.1Toprovideaminimalsetofguidelinesforthe5.3Aminimumofthreeindependentsampledeter-quantitativedeterminationofamethodd

3、etectionminationsshouldbetakenoneachconcentrationlimit(MDL)fromdatasupportingaSEMIProcesslevelofthestandardinvestigated.ChemicalsorGasesspecification.5.4MatrixEffects2.Scope5.4.1Theblankandthestandardsshouldbematrix-2.1Thisguideappliestotracecontaminantsmatchedwith

4、thesamplewhentestingaspecificationspecifiedinSEMIProcessChemicalsorGasesandrununderthesameconditions,bothduringstandardsandguidelines.Allrelevanttracecon-calibrationandsampleanalysis.taminantsshouldhaveanMDLdeterminedfroma5.4.2Ifexternalstandardsinadifferentmatrixa

5、reregressionanalysisofacalibrationcurvethatisequalusedforcalibration,theusermustcompensateforto,orlessthan,theirspecifications.Thisguideismatrixeffectsusingsuitableinternalstandards.intendedforuseinbothestablishingnewspecificationswithinSEMIaswellasverificationof5.

6、5Whereapplicable,thisguidesupersedestheperformancetoSEMIspecifications.earlierrelatedSEMIGuide:SEMIC16.5.6ThefrequencyoftheMDLdeterminationshould3.ReferencedDocumentsbepartofthequalityassuranceprogramforthe3.1SEMIStandardlaboratory.SEMIC16—GuideforPrecisionReportin

7、g/Data6.ProcedureTraceabilityNOTE:ThedeterminationoftheMDLshouldbe13.2OtherDocumentperformedunderthesameconditionsthatsamplesAppliedRegressionAnalysis,2ndEdition,Normanwillnormallyberun.AllappropriateprecautionstoDraperandHarrySmith,JohnWileyandSons,©avoidcontamina

8、tionshouldbefollowed.19814.TerminologyNone.5.BoundaryConditionsNOTE:AseriesofboundaryconditionsisrequiredofthedatafromwhichtheMDListobedetermined