SEMI F58-1000 TEST METHOD FOR DETERMINATION OF MOISTURE

《SEMI F58-1000 TEST METHOD FOR DETERMINATION OF MOISTURE》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、SEMIF58-1000TESTMETHODFORDETERMINATIONOFMOISTUREDRY-DOWNCHARACTERISTICSOFSURFACE-MOUNTEDANDCONVENTIONALGASDISTRIBUTIONSYSTEMSBYATMOSPHERICPRESSUREIONIZATIONMASSSPECTROMETRY(APIMS)ThistestmethodwastechnicallyapprovedbytheGlobalFacilitiesCommitteeandisthedirectresponsibilityoftheNorthAmeri

2、canFacilitiesCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonAugust28,2000.InitiallyavailableonSEMIOnLineAugust2000;tobepublishedOctober2000.2.3.1The“initialdry-down”situation,whichis1Purposedeterminedbythemoisturecontentofthecomponents1.1Thisdocumentdescrib

3、estheprocedureforinthesystem(asreceived)withtheeffectsofdeterminationofthemoisturedry-downcharacteristicsmanufacturingprocessanddesign,surfacequality,pre-(quantityofremovablemoisture)ofsurfacemountedtreatmentandpackagingconvolutedtogether.andconventionalgasdistributionsystems(integrated2

4、.3.2The“responsetoupset”situation,whichisgasdistributionsystems).APIMSiscurrentlythedeterminedbytheamountofmoisturetakenupbythemethodofchoiceforsuchdynamictestsbecauseitissystemandsubsequentlyreleasedinanyexposureafterthecommerciallyavailabletechniquecapableofpptreceipt.moistureanalysisw

5、iththefastestresponsetime.Thistestmethodmayprovideguidelinesfortheapplication2.4SafetyIssues—Thisstandarddoesnotpurporttoofothertechniqueswithsimilardetectionlimitsandaddresssafetyissues,ifany,associatedwithitsuse.ItresponsetimetoAPIMSwhicharenotcommerciallyistheresponsibilityoftheuserso

6、fthisstandardtoavailableatthistime.establishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitations1.2Theresultsofthistestcanbeusedforqualitativepriortouse.rankingofgasdeliverybasedonthedesign.Itcanalsobeusedbyasufficientlysophisticateduserasinputfor3Limita

7、tionsnumericalsimulationofdistributionsystembehavior.3.1Thistestmethodallowsthedeterminationof2Scopemoistureinteractionswhichcanbeused,forexample,toranksystemsinorderofdecreasingmoisture2.1Thistestmethodappliestoalltypesofsurfaceinteraction.Becausedifferentdegreesofmoistu