SEMI F27-0997 TEST METHOD FOR MOISTURE INTERACTION

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1、SEMIF27-0997N/A©SEMI1997TESTMETHODFORMOISTUREINTERACTIONANDCONTENTOFGASDISTRIBUTIONSYSTEMSANDCOMPONENTSBYATMOSPHERICPRESSUREIONIZATIONMASSSPECTROMETRY(APIMS)1Purpose2.1.2Tubingsamplesmustberatherlong(3-4m)toyieldusefulresults,buttheycanbebentintoaUshape1.1Thistestwilldeterminethequantityofrem

2、ovableinordertobeaccommodatedintoapracticaltestmoistureandthedegreeofinteractionwithtracecon-bench.Radiiofcurvatureshouldbenolessthan6centrationsofgasphasemoisture,ofgasdistributiontimestheinternaldiameterofthetubeandthemini-systemsandcomponents.APIMSiscurrentlythetech-mumnumberofbendsshouldb

3、eused.Mostultra-highniqueofchoiceforsuchtestsbecauseitisessentiallypuritycomponentsarecurrentlysuppliedwithmetaltheonlycommerciallyavailablemethodcapableofpptgasketconnectors,sothetestbenchemployedshouldmoistureanalysisandbecauseofitssuperiorresponsebeÞttedwithmatingconnectors.ThistypeofÞttin

4、gistime.Thismethodmayprovideguidelinesfortheusuallyweldedtotubing,whichisnotrecommendedapplicationofothertechniqueswithsimilardetectionasitintroducesapotentialsourceofuncontrolledvari-limitsandresponsetimetoAPIMSwhicharenotcom-abilitytotheexperiments.Instead,acompressionÞt-merciallyavailablea

5、tthistime.tingonthetubeandasuitableadaptershouldbeused.1.2TheresultsofthistestcanbeusedforqualitativeThecompressionÞttingshouldnotbedisconnectedrankingofsystemsandcomponentsandcanalsobeafterinitialconnectionuntilthetestseriesisover.Inused,byasufÞcientlysophisticateduser,asinputforthisway,dete

6、riorationinintegrityoftheconnectionnumericalsimulationofdistributionsystembehavior.canbeavoided.Thesametypeofgaskettocompres-sionÞttingadaptershouldbeusedforalltubingsam-2Scopeples.2.1SystemandComponentTypesÑThisprocedure2.1.3PuriÞersrequirespecialtestproceduresandareappliestoin-linecomponent

7、stobeusedtocontainnotaddressedhere.electronicsgradematerialsinsemiconductorgasdis-2.1.4Simplesystemsconsistingofcomponentscon-tributionsystems.Thefollowingcomponentsarenectedinlinecanbetestedbythepresentmethod.expectedtoyieldmeaningfulresults