SEMI G59-94 TEST METHOD FOR MEASUREMENT OF IONIC

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1、SEMIG59-94N/A©SEMI1994,1996TESTMETHODFORMEASUREMENTOFIONICCONTAMINATIONONLEADFRAMEINTERLEAFINGANDTHECONTAMINATIONTRANSFERREDFROMTHEINTERLEAFINGTOTHELEADFRAMES1Purpose4.5standardsolutionÑAsolutioncontainingaknownconcentrationoftheiontobemeasuredand1.1Thistestmethoddesc

2、ribesaproceduretodeter-usedtocalibratethechromatograph.minetheioniccontaminationonleadframeinterleaÞngandthecontaminationtransferredfromtheinterleaÞng5SummaryofMethodtotheleadframesusingawaterextractionmethod.Ioniccontaminationisextractedinwaterat>95¡Cfor2Scope30±2min

3、utes.Thecontaminationisquantitativelyanalyzedbyiontypeusingionchromatography,and2.1Thistestmethodissensitivetothefollowingtheresultispresentedasnanograms/unitarea.ionicspecies:Na+,NH+,K+,Cl-,NO-,Br-,SO2-,PO3-.43446SigniÞcance6.1Contaminationontheinterleafmaycontribute

4、to3ApplicableDocumentssemiconductordevicereliabilityproblemsbytransfer-3.1SEMISpeciÞcationsenceofthecontaminationtotheleadframes.SEMIG52ÑStandardTestMethodforMeasurement6.2Themethodmaybeusedbyleadframemanufac-ofIonicContaminationonSemiconductorLeadframesturersforthein

5、cominginspectionoftheinterleaÞng(Proposed)material,orbyusersatincominginspectionofthe3.2ASTMSpeciÞcations1leadframes.6.3Correlationofdevicereliabilityresultswithinter-D4327ÑAnionsinWaterbyIonChromatographyleafcontaminationlevelmeasurementsmayleadtoD1193ÑSpecificationf

6、orReagentWaterimprovedinterleafmaterials.4Terminology7Interferences4.1eluentÑThesolventusedtocarrytheextracted7.1Theinterleafmaterialandtheleadframesmustionsthroughtheionexchangechromatograph.onlybetouchedwithcleanedtweezersorwhilewear-ingdouble-layergloveswithpolyeth

7、yleneoutergloves4.2interleaf(forsemiconductorleadframes)ÑAinordertoavoidadditionalcontamination.paperorplasticÞlmwhichisplacedbetweenlayersofsemiconductorleadframesstripstopreventtangling.8Equipment4.3regenerantÑAchemicalsolutioncontainingthe8.1IonChromatographforAnio

8、nandCationAnaly-ionsoriginallypresentinthechromatographcolumnsisÑThisequipmentistoconsistofaconcentrationpriortoatestrun,use