SEMI G48-89 SPECIFICATION FOR MEASUREMENT METHOD FOR MOLDED

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1、SEMIG48-89N/A©SEMI1989,1996SPECIFICATIONFORMEASUREMENTMETHODFORMOLDEDPLASTICPACKAGETOOLING1Prefacedatummarksclearlylabeled.Overlaysaretoolswhichspeedinspection;however,rejectsmustbeveriÞedbyThisdocumentispreparedtoenablestandardmeasure-toolmaker'smicroscopemeasuremen

2、ts,whicharementtechniquestobeused.Itisintendedthatthemea-moreaccurate.surementtechniquesdescribedinthespeciÞcationwillapplytoallmoldedplasticpackagetooling,i.e.DIPS,3.1.3DigitalDepthIndicatorÑMountedonastand.SIPS,PCC,SO,Quad,andTAB.Digitalreadingwitharangeof2"isavail

3、able.Readoutmustdisplayincrementsof.0001"with±1digitaccu-2ApplicableDocumentsracy.2.1SEMISpeciÞcations3.1.4MicrometerÑ0to1.0"..250"diameterformeasuringto.001"accuracy.SEMIG14ÑPlasticMoldedDIPTooling3.1.5Eight(8)inchdialcalipersformeasuringtoSEMIG16ÑPlasticChipCarrier

4、Tooling.002"accuracy.SEMIG36ÑPlasticMoldedHighDensityTABQuad3.1.6GraniteSurfacePlateÑMinimumsizeTooling18"´28",withasurfaceaccuracyof.0002"orbetter.SEMIG37ÑPlasticMoldedSOPackageTooling3.1.7SurfaceFinish3BasicEquipment3.1.7.1CharmilleVisualSurfaceFinishStandardÑ3.1Th

5、efollowingbasicequipmentisrequiredtoper-(ForcomparisonofElectricDischargeMachinedformthespeciÞedmeasurements:(EDM)surfaceonly.)3.1.1Toolmaker'sMicroscopeÑ3´objectiveand3.1.7.2SurfaceComparatorStandardsÑ(Forother10´eyepiecetotal30´withXandYaxesdigitalread-machinedsurf

6、aces.)outsreadingto.0001".Minimumtravelofstagemust3.1.7.3SurfaceAnalyzerbe2.0"´2.0".Eyepiecemusthavecross-hairlines.Accuracyofthesystemmustbe±.0002"minimum.3.1.8Binocular,ZoomMicroscopeÑ10-15´mag-Thetoolmaker'smicroscopeshouldhaveagoniometerniÞcationwithverticalornea

7、rverticallighting.ontheeyepieceaswellasonthestage.Accuracyofthe3.1.9DialIndicatorsÑWithaccuracyof.0001andgoniometershallbe0.1.TheTMmicroscopeshouldwithforcenottoexceed5grams.haveaZaxiswithadigitalmeasurementcapability,3.2AlternativeEquipmentÑSophisticated,auto-readin

8、ginincrementsof.0001".Theobjectivelensmaticequipmentisnotexcludedfromuse,buttheusermustbe20´minimumwhichwillgive.0005"accu-mustensu