SEMI F43-0699 TEST METHOD FOR DETERMINATION OF PARTICLE

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1、SEMIF43-0699TESTMETHODFORDETERMINATIONOFPARTICLECONTRIBUTIONBYPOINT-OF-USEPURIFIERSThisTestMethodwastechnicallyreapprovedbytheGlobalFacilitiesCommitteeandisthedirectresponsibilityoftheNorthAmericanFacilitiesCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonDecember18

2、,1998.InitiallyavailableonSEMIOnLineFebruary1999;tobepublishedJune1999.3.5Theaccuracyofthedatageneratedbythismethod1Purposeislimitedtotheaccuracyoftheparticlemeasuring1.1Thepurposeofthisdocumentistodefineainstrumentsutilized.methodfortestingPOUpurifiersintendedfor3.6Thismethodiswrittenwiththeas

3、sumptionthatinstallationintoahigh-puritygasdistributionsystemtheoperatorunderstandstheuseoftheapparatusataandsemiconductormanufacturingprocessequipment.levelequivalenttosixmonthsofexperience.ApplicationofthistestmethodisexpectedtoyieldcomparabledataamongPOUpurifierstestedforthe4ReferencedDocume

4、ntspurposesofqualificationforitsinstallation.4.1FED-STD-209.FederalStandardAirborne2ScopeParticulateCleanlinessClassesinCleanroomsandCleanZones.GeneralServicesAdministration.2.1Thisdocumentdescribesatestmethoddesignedtodrawcomparisonsofparticulategeneration5TerminologyperformanceofPOUpurifierst

5、estedunderstandardconditions.Theprocedureutilizesacondensation5.1Acronymsnucleuscounter(CNC)appliedtoin-linegaspurifiersCNC–condensationnucleuscountertypicallyusedinsemiconductorapplications.Itappliestopurifiersofvariousmediaandupto5cm(~2in.)DUT–deviceundertesti.d.insizeandforroomtemperatureope

6、ration.TheEP–electropolishedpurifier’sratedflowshouldbeintherangeof0-50standardliterperminute(slpm).ForapplicationsofthiskPa–kiloPascalmethodtolargerpurifiers,thetestingflowrateshouldbeLPC–laserparticlecounterhigherthanspecifiedinthismethod.POU–pointofuse2.2Theexperimentalsetupdescribedinthisme

7、thodcanbeusedfortestingeitherPOUpurifiersorstand-psi–poundspersquareinchalonePOUfilters.psia–poundspersquareinchabsolute3Limitationspsid–poundspersquareinchdifferential3.1Thisprocedureaddressestotalparticlecountpsig–poundspersquar