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1、MagnetronsputteringequipmentsplasmasimulationModules：MSSMPIC-MCCMCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.32CoaxialcylindertypeTargetターゲットNSNsubstrate基板SNSNSCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.33PlanertypeTargetターゲットNSNSNSCopyright2002-2011PEGASUSSoftwareInc.,All
2、rightsreserved.34UBM(UnBalancedMagnetron)typesubstrate基板Magnet磁石Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.35MagnetronsputteringequipmentsSimulationofsputteredparticlesModules：MSSMPIC-MCCMSPUTSMDSMCMCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.36Blockdiagramforsimulationofs
3、putteredparticlesAdsorbedfluxtosub.Database（ＢHCharacteristic）Incidentionstotarget・ParticlefluxDSMCMMSSM・EnergyPIC-MCCM・AngleNn,TnPn,VnNe,Ni,Φ,Es,Ve,ViSPUTSMMagneticfluxdensityDatabaseSASAMALCollisioncrosssectionSputteredparticles・Sputteringflux・Sputteringangle・SputteringenergyCopyright2002-2011PEG
4、ASUSSoftwareInc.,Allrightsreserved.37SimulationofCusputteredparticlesSimulationofCusputteredparticlesinArplasmainArplasmaCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.38Computationalmodelsubstratesubstrateisxaltargeta5c0rimdmmagnet2DModelingof2-D円柱座標系nでaxialsymmetryモデル化liyCtargetYorkCopy
5、right2002-2011PEGASUSSoftwareInc.,Allrightsreserved.39Step1.Magneto-staticsimulationbyMSSMLineofmagneticforceCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.40Step2.PlasmasimulationbyPIC-MCCMAr+density[/m3]Electricpotential[V]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.41Step3.
6、SputteringsimulationbySPUTSMSputteringflux[/m2/s]（Erosionprofile）Sputteringangulardist.ofsputteredparticlesCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.42Step4.SimulationsputteredparticlebyDSMCMDensitydist.ofCuadsorbedflux[/m2/s]SputteredCuatoms[/m3]Copyright2002-2011PEGASUSSoftwareInc.
7、,Allrightsreserved.43Facingtargetmagnetronsputteringequip.Facingtargetmagnetronsputteringequip.SimulationofSisputteredparticlesSimulationofSisputteredparticlesinAr/OinAr/Oplasmaplasma2Copyright2002-2011PEGASUSSof
