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《超高真空多功能磁控溅射镀膜设备（ultra high vacuum multifunctional magnetron sputtering coating equipment）》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。
1、超高真空多功能磁控溅射镀膜设备（Ultrahighvacuummultifunctionalmagnetronsputteringcoatingequipment）UltrahighvacuummultifunctionalmagnetronsputteringcoatingequipmentFirstbootCoolingwaterisconnectedtothemolecularpumpandeachmagneticcontroltarget.Checkthatthewaterwayisleaking.Thepowe
2、rsupplyofeachunitisconnectedwiththemainpowersupply,andthemainpowersupplyissupplied.GateplateG1andG2,startmechanicalpumpIandII,opensolenoidvalve,prepumpingsputteringchamber,samplingroom.Accordingtocoatingneeds,inturnopenedthecut-offvalveV1(gasmixingchamber),V3(oxy
3、gen),V4(argon),MFC1,MFC2,MFC3opentothecleaninggear,preexhaustroad.Compositevacuumgaugethermocouplemeasurementpart(V1fullpartialcurrent87mA,V2fullpartialcurrent100mA,thetwovalueswillchangebecauseofthermocouplereplacement),wereobservedinasputteringchamber,theinject
4、ionchamberoflowvacuum,vacuumtobelessthan20Pawhen(usually2~3Pa),openthemolecularpumpofhighpumpingvacuum.Themolecularpumpisnormal,thecomposite"V1"measurementofionizationsputteringchamber,"V2measurement"intothechamberbelow0.1Pa,canopentheDL-7ultrahighvacuumgaugeathi
5、ghvacuumsputteringchamber;openthecompoundvacuumgaugevacuumgauge"filament"samplechamberhighvacuum(fromthe10-1blockbyplayingtoincreasethevacuum)with10-4~10-5Two,afteropeningthelidTurnonthecoolingwatercirculatingmachineswitch,themolecularpumpandthemagneticcontroltar
6、getconnectthecoolingwatertocheckwhetherthewaterisleakingThetotalpowersupply,L1,L2,L3lightsThecoatingroom,sampleroomforaircondition,gatevalvetoopentheconnectionbetweenG3samplechamber,vacuumchamber,pumpstartII,graduallyopentheinletchamberbypumpinganglevalveV7onroom
7、twosidepumping,openFZH-2BK3compositethermocouplevacuumgaugemeasuringpart(V1orV2)two,thevacuumislowerthan20Pa.(general2~3Pa)ShutoffgatevalveG3,closepullanglevalveV7.StartthemechanicalpumpI,openthesolenoidvalve,openthegatevalveG1,G,openthemolecularpumpIandIIpumping
8、highvacuum.Three,dailybootIngeneral,twovacuumchambersmustbekeptinthevacuumstateof<20PaTurnonthecoolingwatercirculatingmachineTotalpowersupplyStartmechanicalpum
