High-Performance Optical Coatings for VUV Lithography Application.PDF

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1、©2007OSA/OIC2007FA1.pdfa22_1.PDFHigh-PerformanceOpticalCoatingsforVUVLithographyApplicationChristophZaczek,AlexandraPazidis,HorstFeldermannCarlZeissSMTAG,Rudolf-Eber-Strasse2,73447Oberkochen,GermanyAuthor’se-mailaddress:zaczek@smt.zeiss.comAbstract:Toplevelrequirementsandchalle

2、ngesforopticalcoatingsinthelatestgenerationof193nmlithographyopticsarepresented.Emphasisisplacedontheinfluenceofdepositiongeometryeffects,lenselementmaterial,anddepositionprocessontheopticalpropertiesofsuchcoatings.©2007OpticalSocietyofAmericaOCIScodes:310.6860;310.18601.Introd

3、uctionTherequirementsfortheperformanceofopticalcoatingsforhighNA(numericalaperture)193nmlithographycontinuouslyincreasewitheachnewlithographygenerationthatisintroduced.Currently,thehighestNAsare0.93[1]indryand1.35[2]inimmersionlithography.Ontheonehand,theincreasingNAtranslatesi

4、ntohigherlightincidenceanglesonthecoating,resultingintheneedforpolarizationanduniformitycontrol.Ontheotherhand,itleadstoincreasinglenselementdimensions,whichchallengetheabilitytoproduceuniformopticalcoatingperformanceasafunctionofthelenselementsurface.Inthecurrentpresentationwe

5、discusstherequirementsandthechallengesforhigh-performanceopticalcoatingsin193nmlithographyandpresentexamplesofhowopticalconstantsareinfluencedbydepositiongeometryandparameters.2.Toplevelrequirementsforopticalcoatingsfor193nmlithographyTMThespecofthelatest193nmimmersionlithograp

6、hygenerationASMLsTWINSCANXT:1900iwiththeproveninlinecatadioptriclenstechnologyfromCarlZeissSMTAGisshowninTab.1.LensFieldSizeOverlayThroughputNAResolutionX&Y2pt.globalalignment300mmwafers,30mJ/cm²1.35£40nm26x33mm£6nm³131wphTMTab.1ToplevelspecsASMLsTWINSCANXT:1900iThesedemandings

7、pecsinTab.1translateintothefollowingtoplevelrequirementsfortheopticalcoatings:-TheveryhighNAscauseslightincidenceangleshigherthan60°onthecoatings.Consequently,theuniformityoverlightincidenceangleaswellaspolarizationeffectsinamplitudeandphasemustbeaccountedforinthecoatingdesign;

8、-Resolutionof£40nm,ona26mmslitwithanoverlay£6nmputhigh