热电场作用下压电粘弹性微梁的非线性静动力学-分析

热电场作用下压电粘弹性微梁的非线性静动力学-分析

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时间:2019-03-03

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1、硕士学位论文AbstractBeam-typemicrostructuresarethemainMEMSstructures.Theyareusedwidelyinmicrosensors,microactuatorsandothermicro-componentsfortheirsimpleformsandexcellentcontrollability.Thepiezoelectricmicrobeamsconsistofbeam-typemicrostructuresandpiezoelectriclayersandtheirpiezoelectriclaye

2、rscaneffectivelyimprovethesensitivityofmicrosensorsandefficiencyofthemicroactuators.Inthisdissertation,consideringviscoelasticityofmaterialinbeam—typemicrostructures,piezoelectriceffectofmaterialinpiezoelectriclayersandthegeometrynonlinearityofwholemicrostructure,thenonlinearstaticandd

3、ynamicbehaviorofpiezoelectricviscoelasticmicrobeamunderthermal-electriccouplefieldisinvestigated.Themainresearchworksareasfollows:Firstly,basedonviscoelastictheory,Euler-Bernoullibeamassumptionsandpiezoelectrictheory,thestaticanddynamicdifferentialgoverningequationsareestablishedwithth

4、estandardsolidmodel.Thestaticpull-inbehaviorofmicrobeamisresearchedwithGarlerkinmethodandRunge—Kuttamethod.Thecriticalconditionofpull--ininstabilityisinvestigatedandtheinfluenceofmaterialparametersandsystemparametersoncriticalconditionisanalyzed.Furthermore,consideringgeometrynonlinear

5、ityandcoupleeffectofthermal—electricfield,theamplitude-frequencyresponsecharacteristicsofpiezoelectricviscoelasticmicrobeaminfreevibrationandforcedvibrationareinvestigatedwiththeharmonicbalancemethod.Theeffectofrelaxationmodulusonresponsecharacteristicsisfirstlydiscussed.Theresultshows

6、thatthechangeofrelaxationmodulusleadstofluctuationofamplitude—frequencyresponsewithinashortdurationandthetermdecayingwithtimecanbeignoredinsteadyvibration.Basedonanalyticresultaboutrelaxationmodulus,theinfluencesofthedampingcoefficient,voltageamplitudeandotherparametersonamplitude—freq

7、uencycharacteristiccurveofmicrobeaminfreevibrationandforcedvibrationareinvestigated.Finally,asaclamped-guidedmicrobeamunderaxialperiodloadmayencounterdynamicinstability,thestudyonnonlineardynamicstabilityoftheclamped-guidedpiezoelectricviscoelasticmicrobeamunderaxialperiodloadandther

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