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ID:10971780
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页数:8页
时间:2018-07-09
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1、variationandphase-shiftingcapability0PTOELECTR0NICSLETTERSVo1.3No.2,15Mar.2007All--solid--statemicroscopicinterferometerwithfrequency-variationandphase--shiftingcapability*TIANJin—dong,ZHAOXiao—bo,andPENGXiangInstituteofOptoelectronicsandKeylaboratoryofOptoe
2、lectronicDevicesandSystemsofEducationMinistry,ShenzhenUuiversity,Shenzhen518060,China(Received9January2007)Anovelmicroscopicinterferometrywithabilityof~equency-variationandphase-shiftingisproposedformicrostructurestesting.Byusingacousto-optictechnique,sequen
3、tialcarrierscanbegeneratedwithdifferentspatialfrequenciessothatthetemporalphaseunwrappingmethodcanbeappliedfordecodingtheheightinformation.Combinedwithphase-shiftingtechniquerealizedbyspatiallightmodulator,thismethodisespeciallysuitableforintefferometricmeas
4、urementwithhighprecisionandlargedynamicrange.CLCnumber:TB96Documentcode:AArticleID:l673.1905(2007')02-0123-03DOI10.1007/sl180l一007—7Ol3—3Recentdevelopmentofmicroelectromechanicalsystem(MEMS)hascreatedagreatneedford.edicatedinspectionofthemicrostructuresandde
5、vices【".Fortheseminiaturestructures,themicroscopicinterferometryplaysanimpor—tantroleinthestructuretesting.Itiswellknownthatopticalphase-shiftingisdesiredinvariousinterference-basedopti—calsystems,includinglateralshearinginterferometryI2],ho-lographicinteffe
6、rometry【.】andphasemeasuringprofilometry【4】.Opticalphase-shiflingcanbeimplementedinvariousways.Asaconventionalmethod.mechanicaltranslationscanbeachievedbyasteppingmotororapiezoelectrictransducer.Buttheaccuracy,stabilityanddynamicresponsearemainissuesintheappl
7、icationofmechanicalmethodsduetotheirinherentcharacteristicssuchashysteresisandthermaldrift【5】.Analternativemethodisdigitalphase-shiftingbasedonelectronicallyaddressedspatiallightmodulator(SLM)[6].Theadvantageofthismethodisthatthephase-shiftingcanbecontrolled
8、digitallyandnoprecisionmechanicaltranslationisrequired.Byphase-shifting,phaseevaluationcanbeperformedtoobtainawrappedphasemap.Phaseunwrappingisthereforerequiredbeforeunambiguousheightinformation
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