洁净厂房设计术语terms of clean room design

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1、术语1、洁净室cleanroom2、洁净区cleanzone3、移动式洁净小室cleanbooth4、人身净化用室roomforcleaninghumanbody5、物料净化用室roomforcleaningmaterial6、粒径particlesize7、悬浮粒子airborneparticles8、超微粒子ultrafineparticle9、微粒子macroparticle10、粒径分布particlesizedistribution11、含尘浓度particleconcentration12、

2、洁净度cleanliness13、气流流型airpattern14、单向流unidirectionalairflow15、垂直单向流verticalunidirectionalairflow16、水平单向流horizontalunidirectional17、非单向流non-unidirectionalairflow18、混合流mixedairflow19、洁净工作区cleanworkingarea20、风淋室airshower21、气闸室airlock22、传递窗passbox23、洁净工作台clea

3、nbench24、洁净工作服cleanworkinggarment25、空态as-built26、静态atrest27、动态operational28、检漏试验leakagetest29、高效过滤器HEPA30、超高效空气过滤器ULPA（ultralowpenetrationairfilter）31、纯水puritywater32、防静电环境ESDcontrolledenvironment33、表面电阻surfaceresistance34、体积电阻volumeresistance35、表面电阻率sur

4、faceresistivity36、体积电阻率volumeresistivity37、专用消防口firefightingaccess38、自净时间cleanlinessrecoverlycharacteristic39、生物洁净室biologicalcleanroom40、浮游菌airborneviableparticles41、沉降菌Colonyformingunit