CT扩散炉培训教材 设备中英 文版.ppt

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1、centrotherm扩散炉设备培训equipmenttrainingofcentrothermDiffusionfurnaceCentrotherm扩散炉的组成A．Loadingbox推舟部分B.TGA有毒气体排放C.Heatingfurnace加热部分D.Gascabinet气柜设备平面结构Equipmentplanestructure1、CMI电脑2、Loadingbox上料箱3、Toxicgases有毒气体排放4、Furnace炉体5、Gasbox气源柜Loadingbox上料箱Baddlehead舟头Loadingwafer加栽的硅片Loadingbox上料箱Mecha

2、nicalarm机械臂Loadingbox上料箱Storagerack1，2存储位1、2Paddlebearing,adjustablepaddleposition碳化硅桨支座，调节桨位置TGA有毒气体排放quartzdoor石英门Doorcylinder炉门气缸Heatingfurnace炉膛1、CMSmodule3、Powerconnectioncover2、Thermocoupleconnection4、TemperaturesensormoduleGascabinet气源柜1、Flowmeter气体流量计2、Pneumaticvalve气动阀12Coolingwateri

3、nletandwatersystem冷却水系统Coolingtothetopofthefurnacebodyandfurnace对炉膛顶部和炉体进行冷却Thermostaticbath恒温槽OnthePOCL3constanttemperatureprocess,normaltemperature20degrees对POCL3进行恒温作用，正常工艺温度20度Siliconcarbidepaddle碳化硅桨Bearingquartzandsilicon,andoutofthecarriership承载石英舟和硅片石英舟进出的载体Rangedetectionalarm范围检测报警器D

4、etectionofarangeofwhetherobject,avoidhitboatphenomenon,thisrangecanbeadjusted检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节CommunicationNetworkOverview通信网络总览Heatingsystem加热系统Coolingsystem冷却系统1、Heatexchanger2、Cooling3、Shutoffvalve1、Cooling4、Heatexchanger2、Themainfan5、Electronicdevices3、CoolingtheairpassageAla

5、rmlampinformationIndicatorlampcoloractionmeaninggreenopenReadytooperatetwinklepauseblueopenUserinteractionrequiredyellowopenwarningredShineshom:offAlarmerrorOperationpanel操作面板operationpanel4keyboardTouchscreen5touchscreenbuttonUSBsocketOperationpanel操作面板TheequipmenthasthefollowingbuttonStopa

6、ction--AllthemechanicalactionofloadingboxarestopLoadingboxlighting--openclosethelampoftheloadingboxAutohandmanualswitch--Loadingandunloadingoftheoperatingsystemcanmanualoperationinanopenfeedingbox4Allowstounlock--Pressthisbutton,tounlockthecarOperationpanel操作面板1pushbuttonABCkeyboardcall4pus

7、hbuttonrightmousebuttonPushbuttontaskchange5pushbuttonshiftPushbuttonbrightnessABCkeyboardcall---callsupclossesthekeyboardonthetouchscreen,keyboardentriescanbecarriedoutdirectlyonthetouchsceen.Pushbuttontaskchange---changesataskwindowsPushbu