基礎課程名稱：微製造工程導論.ppt

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1、MicroSensors華梵大學機電工程學系基礎課程名稱：微製造工程導論微/奈米光機電高科技學程SensorsTransferthemechanicalbehavior(suchasdeformation,stress,andacceleration)toelectricalsignal.Sensingtechniquescanbecharacterizedasstaticanddynamicapproaches.Staticmethod:stressanddeformation+stressdetection–piezoresistivestraingaugespiezoele

2、ctricsensing.+deformationdetection–capacitanceinterferometer.Dynamicmethod:resonantfrequency+resonantfrequency.華梵大學機電工程學系Source：自強工業科學基金會清華大學方維倫教授Stressdetection–piezoresistivestraingaugeStraingauge–aconductororsemiconductorthatisfabricatedonorbondeddirectlytothesurfacetobemeasuredandthatchan

3、gesindimensionalongwiththesurface.Thegaugeresistanceisveryproportionalwiththechangeingaugedimensionbytwofactors,+deformationoftheshapeofthegauge.+piezoresistivityeffect.Piezoresistivity–amaterialpropertywherethebulkresistivity,ρ,isinfluencedbythemechanicalstressesappliedtothematerial.華梵大學機電工程

4、學系Source：自強工業科學基金會清華大學方維倫教授Stressdetection–piezoresistivestraingaugeThesensitivityisexpressedbytheGaugefactorGF=(1+2μ)+(dρ/ρ)/εwhere,μisPoisson’sratioεisresidualstrainThestraingaugecanalsobeusedtomeasurethevibrationfrequencyofastructures+thestressstatusofastructure(atacertainface)canvaryfromt

5、ensiontocompressionduringvibration,forexample,acantileverbeam.華梵大學機電工程學系Source：自強工業科學基金會清華大學方維倫教授Micromachinedstraingaugehastwoadvantages+Easytodefinethepatternofthegauge.華梵大學機電工程學系+HighGF–traditionalconductorstraingaugetheGFmainlydeterminedbym,however,theGFisdomainatedby(dρ/ρ)forasemiconduct

6、orstraingauge.Source：E,O.Doebelin,MeasurementSystems,1990Stressdetection–piezoelectricsensingPiezoelectricity–thephenomenoninwhichanelectricalvoltagedevelopsduetoanexternallyappliedstress.Anoppositeeffectisalsotrue–thepiezoelectricmaterialwilldeformunderaninputvoltage,thereforeitcanalsobeamat

7、erialforactuator.Siliconisnotapiezoelectricmaterial,thereforeanadditionalpiezoelectricfilmhastobedepositedontothesubstratewhenapplyingthistechnique.ZnOisthemostcommonpiezoelectricmaterialusedinmicrofabrication.華梵大學機電工程學系Source：自強工業科學基金會清華大學方維