SEMI E47-0301 SPECIFICATION FOR 150 mm200 mm POD HANDLES

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1、SEMIE47-0301SPECIFICATIONFOR150mm/200mmPODHANDLESThisspecificationwastechnicallyapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheEuropeanEquipmentAutomationCommittee.CurrenteditionapprovedbytheEuropeanRegionalStandardsCommitteeonOctober26,2000.I

2、nitiallyavailableatwww.semi.orgJanuary2001;tobepublishedMarch2001.Originallypublishedin1995;previouslypublishedOctober2000.1Purpose5Terminology1.1Thisspecificationprovidesaunifiedformand5.1standardmechanicalinterface(SMIF)—thelocationforpodhandlestoenableautomaticpodinterfaceplanebet

3、weenapodandanotherhandling.minienvironmentperSEMIE19.2Scope5.2pod—aboxhavingaStandardMechanicalInterface(SMIF)perSEMIE19.2.1Thisspecificationdefinesthedimensionsandlocationofhandleson150mm/200mmpod.These5.3box—aprotectiveportablecontainerforaprovideautomatichandlingandtakeintoconside

4、rationcassetteand/orsubstrate(s).manualhandling.Thedesignofindividualmanual5.4cassette—anopenstructurethatholdsoneorhandlesisopentobeaccomplishedwithinthemoresubstrates(wafer,masks,etc.).dimensionallimitationsofthestandard.5.5handleofapod—amechanicalaiddesignedfor2.2Thisstandarddoesn

5、otpurporttoaddresssafetyautomatichandlingofapod,whichmayalsobeusedissues,ifany,associatedwithitsuse.Itistheformanualhandling.responsibilityoftheusersofthisstandardtoestablishappropriatesafetyandhealthpracticesanddetermine5.6handlingarea—minimumfreespacearoundthetheapplicabilityofregu

6、latorylimitationspriortouse.podforautomatichandling.5.7handlingofapod—automaticandmanual3Limitationsmovementand/orplacementofapod.3.1Thisspecificationappliesonlytoautomatic5.8orientationnotch—notchlocatedatthepodhandlingofthepodwithaSMIFinterfaceinthehandlestoallowsensingtheorientati

7、onofthepod.Seehorizontalplane(seelimitationsofSEMIE19.3andFigure1.E19.4).DimensionalrestrictionsformanualhandlingaregiveninSEMIE15andSEMIT4.5.9positionnotch—notchlocatedatthecenterlinesofthepodhandlestoallowpositioning.SeeFigure14ReferencedStandards(PN1toPN4).4.1SEMIStandards6Require

8、mentsSEMIE15