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1、SEMIE11-0697N/A©SEMI1987,1997GUIDELINEFOR125mm,150mm,AND200mmPLASTICANDMETALWAFERCARRIERAPPLICATION1ScopeS6ÑAnglefromcarrierlegtosidewall.ThisguidelineidentiÞesthewafercarrierdetailsV1ÑHeightfrombaseofcarrierlegs(DatumB)torequiredtoproperlyregisterthecarrieronsemicon-centerofvertical
2、alignmentpin.Verticalalignmentpinductorprocessandtransporttools.SpeciÞcregistrationisalocatingpinwhichisanequipmentfeature,notcoordinatesforbothhorizontalandverticalcarrierori-attachedtothewafercarrier.entationaredeÞnedtoimprovewaferandcarriertrans-V2ÑDiameterofverticalalignmentpin.p
3、ortoperations.Automatedwaferandcarriertransportapplications4ApplicationGuidesrequireprecisionplacementofcarrierswithinthevari-4.1CentrifugeEquipmentÑWafercarriersrequireoustypesofsemiconductorprocess,inspectionandsupportduringthecentrifugalprocessoperations.Thelogisticequipment.Insom
4、eapplicationsitisnecessaryfollowingsymbolsrepresentthecarriercoordinatestoadequatelysupportthecarriertoavoiddeformation.thatmustbesupportedbythecentrifugetoolstoOperationsrequiringadequatewaferhandlingmustensureadequatesupport:S1throughS6,A2b,D6a,referencethecarriertothedatumsdeÞnedi
5、ntheSEMID6g.CarrierSpeciÞcations.4.2HorizontalCarrierRegistrationÑWafercarriers2ApplicableDocumentspositionedwiththe"H-Bar"downonastationaryorelevatorplatformshouldreferencethecarrieratstable2.1SEMIDocumentslocationsshowninFigure2toensuredependableSEMIE1ÑSpeciÞcationfor3inch,100mm,12
6、5mm,placement.D5b,D5c,andD6baretherecommendedand150mmPlasticandMetalWaferCarriersfinaldetectpointswithintheD6dandD6eenvelope(includingprovisionforD6f).SEMIE1.4ÑStandardfor125mmPlasticandMetalWaferCarriers,AutoTransportUsageNOTE:Otherfeaturesmaybeemployedasprealign-mentguides,butonlyf
7、orcoarseplacement.SEMIE1.7ÑStandardfor200mmPlasticandMetalWaferCarriers,GeneralUsage(Proposed)4.3VerticalCarrierRegistrationÑWafercarrierspositionedwiththewafersintheverticalorientation3SelectedDeÞnitionsshouldemploythe"centeralignment"featureshowninFigure3.TheD6a,D6g,andD9athroughD9
8、ddetailshori
