SEMI E83-1000 SPECIFICATION FOR 300 mm PGV MECHANICAL DOCKING

《SEMI E83-1000 SPECIFICATION FOR 300 mm PGV MECHANICAL DOCKING》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、SEMIE83-1000SPECIFICATIONFOR300mmPGVMECHANICALDOCKINGFLANGEThisProvisionalSpecificationwastechnicallyapprovedbytheGlobalPhysicalInterfaces&CarriersCommitteeandisthedirectresponsibilityoftheNorthAmericanPhysicalInterfaces&CarriersCommittee.CurrenteditionapprovedbytheN

2、orthAmericanRegionalStandardsCommitteeonJuly14,2000.InitiallyavailableonSEMIOnLineAugust2000;tobepublishedOctober2000.OriginallypublishedJune1999.5.2.3docking—Theactoflocatingafloor-based1Purposecarriertransportvehicleforcarriertransferto/from1.1Thisspecificationisin

3、tendedtopromoteequipment(perSEMIE64).consistentinterfacefeaturesbetweenPersonGuided5.2.4facialdatumplane—AverticalplanethatVehiclesandSEMIE15.1equipment.bisectsthewafersandthatisparalleltothefrontsideofthecarrier(wherewafersareremovedorinserted).On2Scopetoolloadports

4、,itisalsoparalleltotheloadfaceplane2.1ThisspecificationdefinesamechanicalstandardspecifiedinSEMIE15onthesideofthetoolwheretheforthestationary(equipment)sideofthedockingcarrierisloadedandunloaded(perSEMIE57).flangeusedby300mmPersonGuidedVehicles5.2.5loadfaceplane—Thef

5、urthestphysicalvertical(PGVs).Thisflangeistobemountedtothefloorwithinboundaryplanefromcarriercentroidontheside(s)ofthevolumedefinedbySEMIE64atSEMIE15.1andtheequipmentwhereloadingofthetoolisintended(perSEMIE64compliantequipment.SEMIE15).2.2Thisstandarddoesnotpurportto

6、addresssafety5.2.6loadport—Theinterfacelocationonatoolissues,ifany,associatedwithitsuse.Itisthewherecarriersareplacedtoallowthetooltoprocessresponsibilityoftheusersofthisstandardtoestablishwafers(perSEMIE15).appropriatesafetyandhealthpracticesanddeterminetheapplicabi

7、lityofregulatorylimitationspriortouse.5.2.7transfer—Toeitherloadorunload(perSEMIE15).3Limitations6Requirements3.1ThisstandarddoesnotdefinethePGV(active)sideofthedockinginterfaceorcarriertransfer.The6.1ThedimensionsthatdefinetheuniversaldockingPGVandthePGVsideofthedoc

8、kinginterfacedesignsflangearelistedinTable1andshownonFigure1.shouldcomprehendthephysicallimitationsof6.1.1Theminimumlengthofthedock