pmos工艺仿真

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1、goathenalinexloc=-10spac=0.5linexloc=0spac=0.5linexloc=10spac=0.5lineyloc=0spac=0.5lineyloc=10spac=0.5initsiliconorientation=100two.ddiffusetemp=1100time=30weto2extractname="Tox"thicknessoxidemat.occno=1x.val=0setlay_left=2setlay_right=7illuminationg.lineillum.filtercl

2、ear.filcirclesigma=0.38projectionna=.54pupil.filterclear.filcirclelayoutlay.clearx.lo=0z.lo=-3x.hi=$lay_leftz.hi=3layoutx.lo=$lay_rightz.lo=-3x.hi=9z.hi=3imageclearwin.x.lo=0win.z.lo=-0.5win.x.hi=9win.z.hi=0.5dx=0.05one.dstructureoutfile=mask.strintensitymaskTonyplotm

3、ask.strdepositname.resist=AZ1350Jthick=.8division=30rate.devname.resist=AZ1350Ji.linec.dill=0.018structureoutfile=preoptolish.strTonyplotpreoptolith.strexposedose=240.0num.refl=10baketime=30temp=100developkimtime=60steps=6substeps=24structureoutfilr=optolith.strrate.et

4、chmachine=wetoxidewet.etchisotropic=0.5u.metchmachine=wettime=2minutesimplantphosphordose=1e13energy=150diffusetime=35temp=1000extractname="xj"xjmaterial="Silicon"mat.occno=1x.val=0junc.occno=1etchoxidealldiffusetemp=950time=30dryo2extractname="Tox"thicknessoxidemat.oc

5、cno=1x.val=0tonyplotsetlay_left=-6setlay_right=-1illuminationg.lineillum.filterclear.filcirclesigma=0.38projectionna=.54pupil.filterclear.filcirclelayoutlay.clearx.lo=--8z.lo=-3x.hi=$lay_leftz.hi=3layoutx.lo=$lay_rightz.lo=-3x.hi=1z.hi=3imageclearwin.x.lo=-8win.z.lo=-0

6、.5win.x.hi=1win.z.hi=0.5dx=0.05one.dstructureoutfile=mask.strintensitymaskTonyplotmask.strdepositname.resist=AZ1350Jthick=.8division=30rate.devname.resist=AZ1350Ji.linec.dill=0.018structureoutfile=preoptolish.strTonyplotpreoptolith.strexposedose=240.0num.refl=10baketi

7、me=30temp=100developkimtime=60steps=6substeps=24structureoutfilr=optolith.strimplantborondose=1e13energy=100tilt=7diffusetime=35temp=1200etchoxidealldiffusetemp=950time=60dryo2extractname="Tox"thicknessoxidemat.occno=1x.val=0depositnitridethick=0.12div=5setlay_left=-0.

8、5setlay_right=1.5illuminationg.lineillum.filterclear.filcirclesigma=0.38projectionna=.54pupil.filterclear.filcirclela