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1、820IEEETransacTIonsonUlTrasonIcs,FErroElEcTrIcs,andFrEqUEncyconTrol,vol.58,no.4,aprIl2011PiezoelectricMultilayerActuatorLifeTeststewartsherrit,XiaoqiBao,christopherM.Jones,JackB.aldrich,chadJ.Blodget,Jamesd.Moore,JohnW.carson,andrenaudGoullioudAbstract—PotentialNASAopticalmissionss
2、uchasthecisionmechanismsforthecontrolofthesurfacepositionofSpaceInterferometerMissionrequireactuatorsforprecisionmirrors.Toobtaintherequiredhigh-precisionnanometer-positioningtoaccuraciesoftheorderofnanometers.Com-scaledisplacements,piezoelectricmultilayeractuatorsaremerciallyavail
3、ablemultilayerpiezoelectricstackactuatorsarebeingconsideredfordrivingtheseprecisionmirrorpositioningbeingconsidered.piezoelectricco-firedstacksormultilay-mechanisms.Thesemechanismshavepotentialmissionopera-ersareusedinavarietyofapplicationsthatrequirerela-tionalrequirementsthatexce
4、ed5yearsforonemissionlife.tivelyhighstressandlargerstrainthanbulkpiezoelectricTotestthefeasibilityofusingthesecommercialactuatorsformaterialscanproduce.Theseapplicationsincludemicro-theseapplicationsandtodeterminetheirreliabilityandthepositioningsystems[1],solidstatepumpsandswitche
5、s[2],redundancyrequirements,alifeteststudywasundertaken.Thenominalactuatorrequirementsforthemostcriticalactua-noiseisolationmounts[3],ultrasonicdrills,andstackedtorsontheSpaceInterferometryMission(SIM)intermsofultrasonictransducers[4].avarietyofpapers[5]–[7]havenumberofcycleswasest
6、imatedfromtheModulationOpticsbeenpublishedonfabricationandcharacterizationoftheMechanism(MOM)andPathlengthcontrolOpticsMechanismpiezoelectricstacksusingquasi-statictechniques.Thesta-(POM)andtheserequirementswereusedtodefinethestudy.bilityoftheactuationmechanismandtheabilitytosenseA
7、tanominaldrivefrequencyof250Hz,onemissionlifeiscalculatedtobe40billioncycles.Inthisstudy,asetofcom-andcontroltheactuationatthislevelcanbecompromisedmercialPZTstacksconfiguredinapotentialflightactuatorbyhysteresis,thermalinstability,piezoelectriccreep,ag-configuration(pre-stressedto
8、18MPaandbondedinflexures)i
