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1、NANOSTRUCTUREDMATERIALSProcessing,PropertiesandPotentialApplicationsEditedbyCarlC.KochNorthCarolinaStateUniversityRaleigh,NorthCarolinaNOYESPUBLICATIONSWILLIAMANDREWPUBLISHINGNorwich,NewYork,U.S.A.Copyright©2002byNoyesPublicationsNopartofthisbookmaybereproducedo
2、rutilizedinanyformorbyanymeans,elec-tronicormechanical,includingphotocopying,recordingorbyanyinformationstorageandretrievalsystem,withoutpermissioninwritingfromthePublisher.LibraryofCongressCatalogCardNumber:2001096788ISBN:0-8155-1451-4PrintedintheUnitedStatesPu
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4、ssumeanyresponsibilityorliabilityfortheaccuracyorcompletenessof,orconsequencesarisingfrom,suchinformation.Thisbookisintendedforinformationalpurposesonly.MentionoftradenamesorcommercialproductsdoesnotconstituteendorsementorrecommendationforusebythePublisher.Final
5、determinationofthesuitabilityofanyinformationorproductforusecontemplatedbyanyuser,andthemannerofthatuse,isthesoleresponsibilityoftheuser.Werecommendthatanyoneintendingtorelyonanyrecommendationofmaterialsorproceduresmentionedinthispublicationshouldsatisfyhimselfa
6、stosuchsuitability,andthathecanmeetallapplicablesafetyandhealthstandards.MATERIALSSCIENCEANDPROCESSTECHNOLOGYSERIESSeriesEditorsGaryE.McGuire,MicroelectronicsCenterofNorthCarolinaStephenM.Rossnagel,IBMThomasJ.WatsonResearchCenterRointanF.Bunshah,UniversityofCali
7、fornia,LosAngeles(1927–1999),foundingeditorElectronicMaterialsandProcessTechnologyCHARACTERIZATIONOFSEMICONDUCTORMATERIALS,Volume1:editedbyGaryE.McGuireCHEMICALVAPORDEPOSITIONFORMICROELECTRONICS:byArthurShermanCHEMICALVAPORDEPOSITIONOFTUNGSTENANDTUNGSTENSILICIDE
8、S:byJohnE.J.SchmitzCHEMISTRYOFSUPERCONDUCTORMATERIALS:editedbyTerrellA.VanderahCONTACTSTOSEMICONDUCTORS:editedbyLeonardJ.BrillsonDIAMONDCHEMICALVAPORDEPOSITION:byHuim
