Vacuum evaporation.pdf

《Vacuum evaporation.pdf》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、VacuumevaporationSimulationofdistributionoffilmthickness(1)Onrotatingsubstrate(2)Comparisonwiththeoreticalvalues(3)ComparisonwithexperimentsregardingdependencyofArgongaspressureCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.133(1)ModelzySubstratex[cm]Absorbedwall100Evaporationsource:

2、Φ=0.290R=100Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.134(1)ComparisonofparticlefluxesStationarysubstrateRotatingsubstrateUnit:[/m2/s]Max.：0.1245×1020Max.：0.4276×1019Min.：0.0075×1020Min.：0.3802×1019Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.135(2)ModelMaterial：ＡｌSub

3、strateTemperature：1000[K]Flux：1.8×1017[#/cm2/s]FlowoutEvaporationsource1)Point2)Surface（5mmsquare）[cm]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.136(2)Distributionoffilmthicknesscos3θcos4θ(Φ=θ)θθSubstrateOAdωr0rΦPointsourceSmallsurfacesourceCopyright2002-2011PEGASUSSoftwareInc.,A

4、llrightsreserved.137(2)DistributionofparticlefluxandpressurePointsourceSmallsurfacesourceCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.138(2)Distributionofparticlefluxpointsmallsurfaceθssene布nkicic分htt厚milmil膜FAngleCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.139(3)Equipm

5、ent/ModelMass：197amuExperimentbyDiameter：174pm(1.74Å)AssociateProf.Temperature：1400℃(1673[K])M.NakamuraFlux：0.874mg/sec(2.6565X1018[#/sec])FacultyofengineeringSurfaceSubstrateevaporationsourceChibaUniv.EnlargementBluecoloredwallispartitionwallCenterlineCopyright2002-2011PEGASUSSoftwareInc.,Al

6、lrightsreserved.140(3)ModelAbsorbedwallexceptHalfmodelinZsymmetricandinflowY-directionboundaryX24Y12SubstrateUnit：ｃｍPartitionSymmetricboundarywall87.51311.15CA1212BA=1.7EvaporationB=0.7surfaceC=0.85Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.141(3)ObservedpointoffilmthicknessObser

7、vedpointZX24YX12Unit：ｃｍSubstrate2411.152.051212Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.142(3)ComparisonwithsimulationandexperimentoffilmthicknessArgaspressuredependencyInthissimulation,gasflowofArisneglected.eSothereareslightl